Персона: Облов, Константин Юрьевич
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Институт нанотехнологий в электронике, спинтронике и фотонике
Институт ИНТЭЛ занимается научной деятельностью и подготовкой специалистов в области исследования физических принципов, проектирования и разработки технологий создания компонентной базы электроники гражданского и специального назначения, а также построения современных приборов на её основе.
Наша основная цель – это создание и развитие научно-образовательного центра мирового уровня в области наноструктурных материалов и устройств электроники, спинтроники, фотоники, а также создание эффективной инновационной среды в области СВЧ-электронной и радиационно-стойкой компонентной базы, источников ТГц излучения, ионно-кластерных технологий материалов.
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- ПубликацияТолько метаданныеSnO2-Pd as a Gate Material for the Capacitor Type Gas Sensor(2019) Samotaev, N.; Oblov, K.; Litvinov, A.; Etrekova, M.; Самотаев, Николай Николаевич; Облов, Константин Юрьевич; Литвинов, Артур Васильевич; Этрекова, Майя Оразгельдыевна© 2019 IEEE.The article describes the result of the use SnO2-Pd thin films as a gate for structure measured ppb range of NO2 gas by the capacitive method. The technological aspects of fabrication SnO2-Pd gate and one comparison by metrological parameters with the classical Pd gate field effect sensor are discussed. The use of SnO2-Pd material allows improvement in sensitivity of NO2 by an order of magnitude compare the classical Pd based gate field effect sensors.
- ПубликацияТолько метаданныеRapid prototyping of mox gas sensors in form-factor of smd packages(2019) Samotaev, N.; Oblov, K.; Ivanova, A.; Gorshkova, A.; Podlepetsky, B.; Самотаев, Николай Николаевич; Облов, Константин Юрьевич; Иванова, Анастасия Владимировна; Подлепецкий, Борис Иванович© 2019 IEEE.this work discusses the design of flexible laser micromilling technology for fast prototyping metal oxide based (MOX) gas sensors in SMD packages as a alternative to traditional silicon clean-room technologies. By laser micromilling technology possible to fabricate custom Micro Electro Mechanical System (MEMS) microhotplate platform and also SMD packages for MOX sensor, that gives complete solution for integration one in devices using IoT conception.
- ПубликацияТолько метаданныеInvestigation of Selectivity and Reproducibility Characteristics of Gas Capacitive MIS Sensors(2021) Mikhailov, A.; Etrekova, M.; Litvinov, A.; Samotaev, N.; Filipchuk, D.; Oblov, K.; Этрекова, Майя Оразгельдыевна; Литвинов, Артур Васильевич; Самотаев, Николай Николаевич; Облов, Константин Юрьевич© 2021, Springer Nature Switzerland AG.The influence of the dielectric material (Ta2O5, Si3N4, (ZrO2)10%(TiO2)90% and SnO2), its formation methods (pulsed laser deposition, plasma-chemical method, sol-gel method, reactive magnetron sputtering) and technological post-processing (forming gas annealing) has been investigated. It is shown that different methods of dielectric material obtaining affect the temperature of maximum sensitivity and response time of gas sensors. However, there is no significant improvement in selectivity in the ppb concentration range. A two-electrode capacitive sensor element was manufactured and tested. The using of two-electrode MIS sensor gives some improvement in selectivity but does not justify the cost of increasing the size and power consumption of the sensors. The reproducibility of characteristics of MIS structures of Pd-SiO2-Si and Pd-Ta2O5-SiO2-Si in sensitivity and response time was studied. More than 90% of suitable MIS structures after forming gas annealing (40 h at TMIS = 130 ℃ in a medium of 2% vol.d. H2 + air) have limit of hydrogen detection 150 ± 75 ppb and characteristic response times to supply and removal of 5 ppm H2 τ0.9 = 5 ± 3 min and τ0.1 = 8 ± 5 min, respectively. It is shown that if the sensor has the greatest sensitivity to hydrogen, then for all other gases it will be also the most sensitive among others. The stability to the effects of NO2 concentration overload was investigated. It is shown that the 1000-fold NO2 concentration overload does not poison the sensor.
- ПубликацияТолько метаданныеCombination of ceramic laser micromachining and printed technology as a way for rapid prototyping semiconductor gas sensors(2021) Fritsch, M.; Mosch, S.; Vinnichenko, M.; Trofimenko, N.; Samotaev, N.; Oblov, K.; Dzhumaev, P.; Самотаев, Николай Николаевич; Облов, Константин Юрьевич; Джумаев, Павел Сергеевич© 2021 by the authors. Licensee MDPI, Basel, Switzerland.The work describes a fast and flexible micro/nano fabrication and manufacturing method for ceramic Micro-electromechanical systems (MEMS)sensors. Rapid prototyping techniques are demonstrated for metal oxide sensor fabrication in the form of a complete MEMS device, which could be used as a compact miniaturized surface mount devices package. Ceramic MEMS were fabricated by the laser micromilling of already pre-sintered monolithic materials. It has been demonstrated that it is possible to deposit metallization and sensor films by thick-film and thin-film methods on the manufactured ceramic product. The results of functional tests of such manufactured sensors are presented, demonstrating their full suitability for gas sensing application and indicating that the obtained parameters are at a level comparable to those of industrial produced sensors. Results of design and optimization principles of applied methods for micro-and nanosystems are discussed with regard to future, wider application in semiconductor gas sensors prototyping.
- ПубликацияТолько метаданныеSilicon MEMS Thermocatalytic Gas Sensor in Miniature Surface Mounted Device Form(2021) Samotaev, N.; Samotaev, N; Dzhumaev, P.; Oblov, K.; Pisliakov, A.; Самотаев, Николай Николаевич; Джумаев, Павел Сергеевич; Облов, Константин Юрьевич; Образцов, Иван СергеевичA reduced size thermocatalytic gas sensor was developed for the detection of methane over the 20% of the explosive concentration. The sensor chip is formed from two membranes with a 150 mu m diameter heated area in their centers and covered with highly dispersed nano-sized catalyst and inert reference, respectively. The power dissipation of the chip is well below 70 mW at the 530 degrees C maximum operation temperature. The chip is mounted in a novel surface mounted metal-ceramic sensor package in the form-factor of SOT-89. The sensitivity of the device is 10 mV/v%, whereas the response and recovery times without the additional carbon filter over the chip are <500 ms and <2 s, respectively. The tests have shown the reliability of the new design concerning the hotplate stability and massive encapsulation, but the high degradation rate of the catalyst coupled with its modest chemical power limits the use of the sensor only in pulsed mode of operation. The optimized pulsed mode reduces the average power consumption below 2 mW.
- ПубликацияОткрытый доступMOSFE-Capacitor Silicon Carbide-Based Hydrogen Gas Sensors(2023) Litvinov, A.; Etrekova, M.; Podlepetsky, B.; Samotaev, N.; Oblov, K.; Литвинов, Артур Васильевич; Этрекова, Майя Оразгельдыевна; Подлепецкий, Борис Иванович; Самотаев, Николай Николаевич; Облов, Константин ЮрьевичThe features of the wide band gap SiC semiconductor use in the capacitive MOSFE sensors structure in terms of the hydrogen gas sensitivity effect, the response speed, and the measuring signals optimal parameters are studied. Sensors in a high-temperature ceramic housing with the Me/Ta2O5/SiCn+/4H-SiC structures and two types of gas-sensitive electrodes were made: Palladium and Platinum. The effectiveness of using Platinum as an alternative to Palladium in the MOSFE-Capacitor (MOSFEC) gas sensors high-temperature design is evaluated. It is shown that, compared with Silicon, the use of Silicon Carbide increases the response rate, while maintaining the sensors high hydrogen sensitivity. The operating temperature and test signal frequency influence for measuring the sensor s capacitance on the sensitivity to H2 have been studied.
- ПубликацияТолько метаданныеTechnology of SMD MOX gas sensors rapid prototyping(2020) Samotaev, N.; Oblov, K.; Veselov, D.; Podlepetsky, B.; Etrekova, M.; Volkov, N.; Zibilyuk, N.; Самотаев, Николай Николаевич; Облов, Константин Юрьевич; Веселов, Денис Сергеевич; Подлепецкий, Борис Иванович; Этрекова, Майя Оразгельдыевна© 2020 Trans Tech Publications Ltd, Switzerland.This work discusses the design of flexible laser micromilling technology for fast prototyping of metal oxide based (MOX) gas sensors in SMD packages as an alternative to traditional silicon clean room technologies. By laser micromilling technology it is possible to fabricate custom Micro Electro Mechanical System (MEMS) microhotplate platform and also packages for MOX sensor, that gives complete solution for its integration in devices using IoT conception. The tests described in the work show the attainability of the stated results for the fabrication of microhotplates.
- ПубликацияТолько метаданныеImprovement of field effect capacity type gas sensor thermo inertial parameters by using laser micromilling technique(2020) Samotaev, N.; Oblov, K.; Etrekova, M.; Veselov, D.; Ivanova, A.; Litvinov, A.; Самотаев, Николай Николаевич; Облов, Константин Юрьевич; Этрекова, Майя Оразгельдыевна; Веселов, Денис Сергеевич; Иванова, Анастасия Владимировна; Литвинов, Артур Васильевич© 2020 Trans Tech Publications Ltd, Switzerland.This paper presents a verification of technology aspects for improvement of field effect capacity type gas sensor parameters by using laser micromilling technique for fabrication ceramic surface mounting device (SMD) package and microheater for sustentation working temperature of metal-insulator-semiconductor structure (MIS structure). Innovative claims include: demonstration of flexible opportunities for new digital fabrication process flows based on laser micromilling tech: fast design of SMD sensor 3-D model, flexible changing topology of microheater, thick and thin film technology combination for reducing of power consumption. The results show possibility to fast fabrication functional sensor in customer ceramic SMD package with base 9x9 mm with twice reduced power consumption and improving mechanical properties compare with classical metal-glass microelectronic packages using before for such type sensors.
- ПубликацияТолько метаданныеParameter studies of ceramic MEMS microhotplates fabricated by laser micromilling technology(2020) Samotaev, N.; Oblov, K.; Etrekova, M.; Veselov, D.; Gorshkova, A.; Самотаев, Николай Николаевич; Облов, Константин Юрьевич; Этрекова, Майя Оразгельдыевна; Веселов, Денис Сергеевич© 2020 Trans Tech Publications Ltd, Switzerland.This paper presents a modeling of technology aspects for fabrication ceramic microelectromechanical systems (MEMS) microhotplate and surface mounting device (SMD) packaging for (MOX) gas sensors applications. Innovative claims include: demonstration of flexible opportunities for new fabrication process flows based on laser micromilling tech; modeling of power consumption MEMS microhotplate depending on the thickness and topology; demonstration of necessity changing thick film technology of metallization to vacuum sputtering by reducing of power consumption. The results show possibility to fast fabrication of different topologies for ceramic MEMS microhotplate in form-factor of SOT-23 type SMD package.
- ПубликацияОткрытый доступPrototype of nitro compound vapor and trace detector based on a capacitive MIS sensor(2020) Mikhailov, A.; Samotaev, N.; Litvinov, A.; Etrekova, M.; Oblov, K.; Filipchuk, D.; Самотаев, Николай Николаевич; Литвинов, Артур Васильевич; Этрекова, Майя Оразгельдыевна; Облов, Константин Юрьевич© 2020 by the authors. Licensee MDPI, Basel, Switzerland.A prototype of a nitro compound vapor and trace detector, which uses the pyrolysis method and a capacitive gas sensor based on the metal–insulator–semiconductor (MIS) structure type Pd–SiO2 –Si, was developed and manufactured. It was experimentally established that the detection limit of trinitrotoluene trace for the detector prototype is 1 × 10−9 g, which corresponds to concentration from 10−11 g/cm3 to 10−12 g/cm3. The prototype had a response time of no more than 30 s. The possibility of further improving the characteristics of the prototype detector by reducing the overall dimensions and increasing the sensitivity of the MIS sensors is shown.