Персона: Самотаев, Николай Николаевич
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Институт нанотехнологий в электронике, спинтронике и фотонике
Институт ИНТЭЛ занимается научной деятельностью и подготовкой специалистов в области исследования физических принципов, проектирования и разработки технологий создания компонентной базы электроники гражданского и специального назначения, а также построения современных приборов на её основе.
Наша основная цель – это создание и развитие научно-образовательного центра мирового уровня в области наноструктурных материалов и устройств электроники, спинтроники, фотоники, а также создание эффективной инновационной среды в области СВЧ-электронной и радиационно-стойкой компонентной базы, источников ТГц излучения, ионно-кластерных технологий материалов.
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- ПубликацияТолько метаданныеMethods and Tools for Evaluating the Characteristics of MIS-Capacitor Gas Sensors(2022) Podlepetsky, B. I.; Samotaev, N. N.; Etrekova, M. O.; Litvinov, A. V.; Подлепецкий, Борис Иванович; Самотаев, Николай Николаевич; Этрекова, Майя Оразгельдыевна; Литвинов, Артур ВасильевичBased on the electrophysical models of electrical characteristics of MIS-capacitor sensors, we analyze the features of methods and tools for evaluating metrological characteristics of the sensors in general terms and using the example of hydrogen-sensitive sensor elements with Pd-SiO2-Si structure. Recommendations are given on the choice of optimal circuit modes for determining the performance characteristics of the sensors of concentrations of hydrogen-containing gases and of gas analyzers for various purposes.
- ПубликацияТолько метаданныеLaser Micromilling Technology as a Key for Rapid Ceramic MEMS Devices(2019) Oblov, K. Y.; Samotaev, N. N.; Etrekova, M. O.; Gorshkova, A. V.; Облов, Константин Юрьевич; Самотаев, Николай Николаевич; Этрекова, Майя Оразгельдыевна© 2019, Pleiades Publishing, Ltd.The flexible laser micromilling technology for ceramic MEMS production of microhotplates in the surface mount device (SMD) package is described. Current results demonstrate that using described technology makes it possible to manufacture all parts of MEMS sensor in the SMD with form factor of SOT-23 package type.
- ПубликацияТолько метаданныеImprovement of field effect capacity type gas sensor thermo inertial parameters by using laser micromilling technique(2020) Samotaev, N.; Oblov, K.; Etrekova, M.; Veselov, D.; Ivanova, A.; Litvinov, A.; Самотаев, Николай Николаевич; Облов, Константин Юрьевич; Этрекова, Майя Оразгельдыевна; Веселов, Денис Сергеевич; Иванова, Анастасия Владимировна; Литвинов, Артур Васильевич© 2020 Trans Tech Publications Ltd, Switzerland.This paper presents a verification of technology aspects for improvement of field effect capacity type gas sensor parameters by using laser micromilling technique for fabrication ceramic surface mounting device (SMD) package and microheater for sustentation working temperature of metal-insulator-semiconductor structure (MIS structure). Innovative claims include: demonstration of flexible opportunities for new digital fabrication process flows based on laser micromilling tech: fast design of SMD sensor 3-D model, flexible changing topology of microheater, thick and thin film technology combination for reducing of power consumption. The results show possibility to fast fabrication functional sensor in customer ceramic SMD package with base 9x9 mm with twice reduced power consumption and improving mechanical properties compare with classical metal-glass microelectronic packages using before for such type sensors.
- ПубликацияТолько метаданныеProtective Coatings on Hafnium Hydride and Their Effect on Its Thermal Decomposition(2024) Shornikov, D. P.; Mikhalchik, V. V.; Ivanov, G. A.; Tenishev,A.V.; Staltsov, M. S.; Samotaev, N. N.; Шорников, Дмитрий Павлович; Михальчик, Владимир Валерьевич; Иванов, Георгий Андреевич; Тенишев, Андрей Вадимович; Стальцов, Максим Сергеевич; Самотаев, Николай Николаевич
- ПубликацияТолько метаданныеSilicon MEMS Thermocatalytic Gas Sensor in Miniature Surface Mounted Device Form(2021) Samotaev, N.; Samotaev, N; Dzhumaev, P.; Oblov, K.; Pisliakov, A.; Самотаев, Николай Николаевич; Джумаев, Павел Сергеевич; Облов, Константин Юрьевич; Образцов, Иван СергеевичA reduced size thermocatalytic gas sensor was developed for the detection of methane over the 20% of the explosive concentration. The sensor chip is formed from two membranes with a 150 mu m diameter heated area in their centers and covered with highly dispersed nano-sized catalyst and inert reference, respectively. The power dissipation of the chip is well below 70 mW at the 530 degrees C maximum operation temperature. The chip is mounted in a novel surface mounted metal-ceramic sensor package in the form-factor of SOT-89. The sensitivity of the device is 10 mV/v%, whereas the response and recovery times without the additional carbon filter over the chip are <500 ms and <2 s, respectively. The tests have shown the reliability of the new design concerning the hotplate stability and massive encapsulation, but the high degradation rate of the catalyst coupled with its modest chemical power limits the use of the sensor only in pulsed mode of operation. The optimized pulsed mode reduces the average power consumption below 2 mW.
- ПубликацияТолько метаданныеSelective Ammonia Detection by Field Effect Gas Sensor as an Instrumentation Basis for HP-Infection Primary Diagnosis(2022) Mikhailov, A.; Samotaev, N.; Etrekova, M.; Litvinov, A.; Самотаев, Николай Николаевич; Этрекова, Майя Оразгельдыевна; Литвинов, Артур Васильевич© 2022, The Author(s), under exclusive license to Springer Nature Switzerland AG.The clinical tests of device based on Metal Insulator Semiconductor Field Effect (MIS-FE) gas sensor for Helicobacter pylori infection diagnostics (HP-infection) are done by breath test method. This method is based on detecting increase ammonia concentration in patient’s exhaled air after reception of carbamide water solution. The device’s stable operation is based on MIS-FE gas sensor’s high sensitivity to ammonia, sensor’s parameters stability as well as especially developed two channels gas sampling system.
- ПубликацияОткрытый доступСОЧЕТАНИЕ МЕТОДОВ ЛАЗЕРНОГО И МАГНЕТРОННОГО РАСПЫЛЕНИЯ ДЛЯ ИЗГОТОВЛЕНИЯ ТВЕРДОТЕЛЬНЫХ ЕМКОСТНЫХ ДАТЧИКОВ ГАЗА(НИЯУ МИФИ, 2025) ЛИТВИНОВ, А. В.; ЭТРЕКОВА, М. О.; САМОТАЕВ, Н. Н.; ОБЛОВ, К. Ю.; ПЕВЦОВ, И. Д.; Облов, Константин Юрьевич; Самотаев, Николай Николаевич; Литвинов, Артур Васильевич; Этрекова, Майя Оразгельдыевна; Певцов, Илья ДенисовичИсследована чувствительность датчиков на основе МДП-структур Pt-PdO-SiO2-Si-Pt к содержанию Н2, H2S, NO2 и NH3 в воздухе в зависимости от режимов термической постобработки в среде чистого воздуха и в смеси с водородом.
- ПубликацияТолько метаданныеSnO2-Pd as a Gate Material for the Capacitor Type Gas Sensor(2019) Samotaev, N.; Oblov, K.; Litvinov, A.; Etrekova, M.; Самотаев, Николай Николаевич; Облов, Константин Юрьевич; Литвинов, Артур Васильевич; Этрекова, Майя Оразгельдыевна© 2019 IEEE.The article describes the result of the use SnO2-Pd thin films as a gate for structure measured ppb range of NO2 gas by the capacitive method. The technological aspects of fabrication SnO2-Pd gate and one comparison by metrological parameters with the classical Pd gate field effect sensor are discussed. The use of SnO2-Pd material allows improvement in sensitivity of NO2 by an order of magnitude compare the classical Pd based gate field effect sensors.
- ПубликацияТолько метаданныеResponses’ parameters of hydrogen sensors based on MISFET with Pd(Ag)-Ta 2 O 5 -SiO 2 -Si structure(2019) Kovalenko, A.; Podlepetsky, B.; Samotaev, N.; Подлепецкий, Борис Иванович; Самотаев, Николай Николаевич© 2019 Elsevier B.V. The influence of the hydrogen concentration and electric modes of measuring circuits on responses’ parameters of the hydrogen sensors based on metal-insulator-semiconductor field-effect transistor (MISFET) with structure Pd(Ag)-Ta 2 O 5 -SiO 2 -Si have been experimentally studied. MISFET-based sensing elements have been fabricated by means of conventional MOS-technology on single silicon chip together with (p–n)-junction temperature sensor and heater-resistor. The responses of MISFETs for different hydrogen concentrations and drain currents were measured. It was shown how the responses’ amplitude and time parameters depend on hydrogen concentrations and the measuring circuit's electric modes. To interpret results there was developed the generalized model of MISFET's responses for different hydrogen concentrations, parameters of which were calculated using experimental data. These models can be used for simulation and prediction performances of MISFET-based sensors and gas-analysis devices.
- ПубликацияТолько метаданныеEffective method for the platinum group metals extracting from spent diesel autocatalysts(2020) Tietz, A.; Antonov, A.; Samotaev, N.; Tsarev, G.; Veselov, D.; Kirichenko, A.; Самотаев, Николай Николаевич; Веселов, Денис Сергеевич© 2020 Trans Tech Publications Ltd, Switzerland.The team of authors described a solution to the problem of developing a fundamentally new technology for the industrial processing of spent diesel automotive catalysts containing platinum group metals (PGM) and SiC carrier, which has such advantages as carrying out a full processing cycle in one hardware module. The processing of SiC catalyst is extremely difficult by pyrometallurgical methods, but proposed technology is based on the electrochlorination method. The scientific novelty of the proposed method lies in the superposition of two independent electrolysis processes in direct and alternating, with varying frequency, currents under conditions of forced, continuous and complete recondensation of the electrolyte. The study of the diesel catalysts processing by the electrochlorination method have carried out.