Персона: Самотаев, Николай Николаевич
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Институт нанотехнологий в электронике, спинтронике и фотонике
Институт ИНТЭЛ занимается научной деятельностью и подготовкой специалистов в области исследования физических принципов, проектирования и разработки технологий создания компонентной базы электроники гражданского и специального назначения, а также построения современных приборов на её основе.
Наша основная цель – это создание и развитие научно-образовательного центра мирового уровня в области наноструктурных материалов и устройств электроники, спинтроники, фотоники, а также создание эффективной инновационной среды в области СВЧ-электронной и радиационно-стойкой компонентной базы, источников ТГц излучения, ионно-кластерных технологий материалов.
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Николай Николаевич
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44 results
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- ПубликацияОткрытый доступDetection of Chlorine by field effect sensor(2019) Samotaev, N. N.; Litvinov, A. V.; Etrekova, M. O.; Самотаев, Николай Николаевич; Литвинов, Артур Васильевич; Этрекова, Майя Оразгельдыевна© Published under licence by IOP Publishing Ltd.The gas analytical system for chlorine gas measurement based on metal-insulator-semiconductor field effect (MIS FE) type sensor has been developed. High sensitivity of MIS FE sensor to chlorine allows measuring concentrations in the sub-ppb level and to be stable for overload hydrogen gas concentration typically present in industrial electrolysis application. With the pulse heating mode, the response and relaxation times of the MIS sensor are reduced by an order of magnitude which gives chance to use one for high precision environmental control.
- ПубликацияОткрытый доступPerformance Degradations of MISFET-Based Hydrogen Sensors with a Pd-Ta 2 O 5 -SiO 2 -Si Structure During Long-Term Operation(2019) Kovalenko, A.; Podlepetsky, B.; Samotaev, N.; Nikiforova, M.; Подлепецкий, Борис Иванович; Самотаев, Николай НиколаевичWe present the generalized experimental results of performance degradation of hydrogen sensors based on metal-insulator-semiconductor field effect transistor (MISFET)with the structure Pd-Ta2O5-SiO2-Si. The n-channel MISFET elements were fabricated on silicon single chips together with temperature sensors and heater-resistors by means of conventional -technology. Two hundred cycles of responses to different hydrogen concentrations were measured during eight weeks using special measuring and temperature stabilization circuitries with a feedback loop based on the chip's thermo-sensor and heater. We show how the response parameters change during long-term tests of sensors under repeated hydrogen impacts. There were two stages of time-dependent response instability, the degradation of which depends on operating conditions, hydrogen concentrations, and time. To interpret results, we proposed the models, parameters of which were calculated using experimental data. These models can be used to predict performances of MISFET-based gas analysis devices for long-term operation.
- ПубликацияОткрытый доступMicro-catalytic gas sensor operating modes for extended life service, increasing sensitivity to target gases and power consumption reduction(2020) Ducso, C.; Samotaev, N.; Oblov, K.; Dzhumaev, P.; Filipchuk, D.; Самотаев, Николай Николаевич; Облов, Константин Юрьевич; Джумаев, Павел Сергеевич© 2020 Institute of Physics Publishing. All rights reserved.Catalytic gas sensors are among of the most old and widespread gas sensors for combustible gas concentration measurements. However, power consumption these sensors provide is relativity high for modern electronic applications. In this paper research results of combination a silicon MEMS fabrication with operating modes for extended life service, increasing sensitivity to target gases and power consumption reduction are presented. The described solutions allow achieving long-term stability of the sensor in difficult operating conditions - the main requirement for industrial applications, where the continuity of the process is of high value expressed in tangible assets and human lives.
- ПубликацияОткрытый доступPreparation of Alumina Thin Films by Reactive Modulated Pulsed Power Magnetron Sputtering with Millisecond Pulses(2024) Tumarkin, A. V.; Kolodko, D. V.; Kharkov, M. M.; Stepanova, T. V.; Kaziev, A. V.; Samotaev, N. N.; Oblov, K. Yu.; Тумаркин, Александр Владимирович; Колодко, Добрыня Вячеславич; Харьков, Максим Михайлович; Степанова, Татьяна Владимировна; Казиев, Андрей Викторович; Самотаев, Николай Николаевич; Облов, Константин ЮрьевичThispaper aims to investigate the quality of thin alumina films deposited on glass samples using magnetron sputtering in the reactive modulated pulsed power mode (MPPMS) and evaluate the process productivity. The aluminum target was sputtered in Ar/O2 gas mixtures with different fractions of oxygen in the total gas flow, in the fixed pulsed voltage mode. The pulse-on duration was varied between 5 and 10 ms, while the pulse-off time was 100 or 200 ms. The dependences of mass deposition rate and discharge current on the oxygen flow were measured, and the specific deposition rate values were calculated. Prepared coatings had a thicknesses of 100ў??400 nm. Their quality was assessed by scratch testing and by measuring density, refractory index, and extinction coefficient for different power management strategies. The strong influence of pulse parameters on the coating properties was observed, resulting in a maximum density of 3.6 g/cm3 and a refractive index of 1.68 for deposition modes with higher duty cycle values. Therefore, adjusting the pulse-on and pulse-off periods in MPPMS can be used not only to optimize the deposition rate but also as a tool to tune the optical characteristics of the films. The performance of the studied deposition method was evaluated by comparing the specific growth rates of alumina coatings with the relevant data for other magnetron discharge modes. In MPPMS, a specific deposition rate of 200 nm/min/kW was obtained for highly transparent Al2O3, without using any dedicated feedback loop system for oxygen pressure stabilization, which makes MPPMS superior to short-pulse high-power impulse magnetron sputtering (HiPIMS) modes.
- ПубликацияОткрытый доступThermal Conductivity Gas Sensors for High-Temperature Applications(2024) Samotaev, N.; Podlepetsky, B.; Mashinin, M.; Ivanov, I.; Obraztsov, I.; Oblov, K.; Dzhumaev, P.; Самотаев, Николай Николаевич; Подлепецкий, Борис Иванович; Машинин, Михаил Олегович; Иванов, Игорь Александрович; Образцов, Иван Сергеевич; Облов, Константин Юрьевич; Джумаев, Павел СергеевичThis paper describes a fast and flexible microfabrication method for thermal conductivity gas sensors useful in high-temperature applications. The key parts of the sensor, the microheater and the package, were fabricated from glass-coated platinum wire and the combination of laser micromilling (ablation) of already-sintered monolithic ceramic materials and thick-film screen-printing technologies. The final thermal conductivity gas sensor was fabricated in the form of a complete MEMS device in a metal ceramic package, which could be used as a compact miniaturized surface-mounted device for soldering to standard PCB. Functional test results of the manufactured sensor are presented, demonstrating their full suitability for gas sensing applications and indicating that the obtained parameters are at a level comparable to those of standard industrially produced sensors. The results of the design and optimization principles of applied methods are discussed with regard to possible wider applications in thermal gas sensor prototyping in the future. The advantage of the developed sensors is their ability to operate in air environments under high temperatures of 900 ‚шC and above. The sensor element material and package metallization were insensitive to oxidation compared with classical sensor-solution-based metalў??glass packages and silicone MEMS membranes, which exhibit mechanical stress at temperatures above 700 ‚шC.
- ПубликацияТолько метаданныеMeasurement Circuits' Characteristics of MISFET-based Sensors(2021) Podlepetsky, B.; Kovalenko, A.; Samotaev, N.; Подлепецкий, Борис Иванович; Самотаев, Николай Николаевич© 2021 IEEE.We have studied possible variants of the embedding MISFETs' sensing elements in measuring circuits of sensors. The electro-physical models for calculating the characteristics of circuits were proposed and used to estimate its performances.
- ПубликацияОткрытый доступCeramic packages prototyping for electronic components by using laser micromilling technology(2020) Samotaev, N. N.; Oblov, K. Y.; Gorshkova, A. V.; Ivanova, A. V.; Philipchuk, D. V.; Самотаев, Николай Николаевич; Облов, Константин Юрьевич; Иванова, Анастасия Владимировна© Published under licence by IOP Publishing Ltd.The use of adaptive laser micromilling technology for the fast prototyping ceramic package of electronic components in a miniature surface mount form factor (SMD) is describing. Current experimental results and practical evaluation of one show that using the developed software and hardware is possible successfully producing SMD packages starting from the SOT-723 form-factor in the direction of larger overall dimensions to SOT-475 form-factor. Also discussed are the limiting physical factors arising in the course of the application of laser micromilling technology, which affect the production speed and quality of the resulting product from monolithic ceramics.
- ПубликацияОткрытый доступPrototype of nitro compound vapor and trace detector based on a capacitive MIS sensor(2020) Mikhailov, A.; Samotaev, N.; Litvinov, A.; Etrekova, M.; Oblov, K.; Filipchuk, D.; Самотаев, Николай Николаевич; Литвинов, Артур Васильевич; Этрекова, Майя Оразгельдыевна; Облов, Константин Юрьевич© 2020 by the authors. Licensee MDPI, Basel, Switzerland.A prototype of a nitro compound vapor and trace detector, which uses the pyrolysis method and a capacitive gas sensor based on the metal–insulator–semiconductor (MIS) structure type Pd–SiO2 –Si, was developed and manufactured. It was experimentally established that the detection limit of trinitrotoluene trace for the detector prototype is 1 × 10−9 g, which corresponds to concentration from 10−11 g/cm3 to 10−12 g/cm3. The prototype had a response time of no more than 30 s. The possibility of further improving the characteristics of the prototype detector by reducing the overall dimensions and increasing the sensitivity of the MIS sensors is shown.
- ПубликацияТолько метаданныеTechnology of SMD MOX gas sensors rapid prototyping(2020) Samotaev, N.; Oblov, K.; Veselov, D.; Podlepetsky, B.; Etrekova, M.; Volkov, N.; Zibilyuk, N.; Самотаев, Николай Николаевич; Облов, Константин Юрьевич; Веселов, Денис Сергеевич; Подлепецкий, Борис Иванович; Этрекова, Майя Оразгельдыевна© 2020 Trans Tech Publications Ltd, Switzerland.This work discusses the design of flexible laser micromilling technology for fast prototyping of metal oxide based (MOX) gas sensors in SMD packages as an alternative to traditional silicon clean room technologies. By laser micromilling technology it is possible to fabricate custom Micro Electro Mechanical System (MEMS) microhotplate platform and also packages for MOX sensor, that gives complete solution for its integration in devices using IoT conception. The tests described in the work show the attainability of the stated results for the fabrication of microhotplates.
- ПубликацияТолько метаданныеImprovement of field effect capacity type gas sensor thermo inertial parameters by using laser micromilling technique(2020) Samotaev, N.; Oblov, K.; Etrekova, M.; Veselov, D.; Ivanova, A.; Litvinov, A.; Самотаев, Николай Николаевич; Облов, Константин Юрьевич; Этрекова, Майя Оразгельдыевна; Веселов, Денис Сергеевич; Иванова, Анастасия Владимировна; Литвинов, Артур Васильевич© 2020 Trans Tech Publications Ltd, Switzerland.This paper presents a verification of technology aspects for improvement of field effect capacity type gas sensor parameters by using laser micromilling technique for fabrication ceramic surface mounting device (SMD) package and microheater for sustentation working temperature of metal-insulator-semiconductor structure (MIS structure). Innovative claims include: demonstration of flexible opportunities for new digital fabrication process flows based on laser micromilling tech: fast design of SMD sensor 3-D model, flexible changing topology of microheater, thick and thin film technology combination for reducing of power consumption. The results show possibility to fast fabrication functional sensor in customer ceramic SMD package with base 9x9 mm with twice reduced power consumption and improving mechanical properties compare with classical metal-glass microelectronic packages using before for such type sensors.