Персона: Литвинов, Артур Васильевич
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Improvement of field effect capacity type gas sensor thermo inertial parameters by using laser micromilling technique
© 2020 Trans Tech Publications Ltd, Switzerland.This paper presents a verification of technology aspects for improvement of field effect capacity type gas sensor parameters by using laser micromilling technique for fabrication ceramic surface mounting device (SMD) package and microheater for sustentation working temperature of metal-insulator-semiconductor structure (MIS structure). Innovative claims include: demonstration of flexible opportunities for new digital fabrication process flows based on laser micromilling tech: fast design of SMD sensor 3-D model, flexible changing topology of microheater, thick and thin film technology combination for reducing of power consumption. The results show possibility to fast fabrication functional sensor in customer ceramic SMD package with base 9x9 mm with twice reduced power consumption and improving mechanical properties compare with classical metal-glass microelectronic packages using before for such type sensors.
ПОТЕНЦИАЛ МЕТОДА ИМПУЛЬСНОГО ЛАЗЕРНОГО НАПЫЛЕНИЯ ДЛЯ СОВЕРШЕНСТВОВАНИЯ ГАЗОВЫХ МДП-СЕНСОРОВ
Рассмотрены подходы к совершенствованию газовых сенсоров на основе МДП-конденсаторов (MOSFE) с использованием методов, совместимых с существующим технологическим процессом их изготовления на основе импульсного лазерного напыления (PLD) тонких пленок в вакууме.
Cluster Model of the Mechanism of Sensitivity of Gas Sensors Based on MIS Structures
© 2019, Pleiades Publishing, Ltd.A cluster model of the mechanism of sensitivity to gases is proposed, according to which the change in the electric capacity of a MIS sensor under the action of gas is caused by a change in the dielectric constant of the metal — dielectric transition layer under the action of gas molecules. The dielectric constant of the transition layer changes due to the rearrangement of the electronic structure of the traps.
Fast Prototyping Ceramic Gas Flow Sensors for Harsh Operating Conditions
Investigation of Selectivity and Reproducibility Characteristics of Gas Capacitive MIS Sensors
© 2021, Springer Nature Switzerland AG.The influence of the dielectric material (Ta2O5, Si3N4, (ZrO2)10%(TiO2)90% and SnO2), its formation methods (pulsed laser deposition, plasma-chemical method, sol-gel method, reactive magnetron sputtering) and technological post-processing (forming gas annealing) has been investigated. It is shown that different methods of dielectric material obtaining affect the temperature of maximum sensitivity and response time of gas sensors. However, there is no significant improvement in selectivity in the ppb concentration range. A two-electrode capacitive sensor element was manufactured and tested. The using of two-electrode MIS sensor gives some improvement in selectivity but does not justify the cost of increasing the size and power consumption of the sensors. The reproducibility of characteristics of MIS structures of Pd-SiO2-Si and Pd-Ta2O5-SiO2-Si in sensitivity and response time was studied. More than 90% of suitable MIS structures after forming gas annealing (40 h at TMIS = 130 ℃ in a medium of 2% vol.d. H2 + air) have limit of hydrogen detection 150 ± 75 ppb and characteristic response times to supply and removal of 5 ppm H2 τ0.9 = 5 ± 3 min and τ0.1 = 8 ± 5 min, respectively. It is shown that if the sensor has the greatest sensitivity to hydrogen, then for all other gases it will be also the most sensitive among others. The stability to the effects of NO2 concentration overload was investigated. It is shown that the 1000-fold NO2 concentration overload does not poison the sensor.
SnO2-Pd as a Gate Material for the Capacitor Type Gas Sensor
© 2019 IEEE.The article describes the result of the use SnO2-Pd thin films as a gate for structure measured ppb range of NO2 gas by the capacitive method. The technological aspects of fabrication SnO2-Pd gate and one comparison by metrological parameters with the classical Pd gate field effect sensor are discussed. The use of SnO2-Pd material allows improvement in sensitivity of NO2 by an order of magnitude compare the classical Pd based gate field effect sensors.
Hydrogen concentration control in oil-filled power transformers using field effect capacitive gas sensors
© 2021 The Author(s).A simple method is demonstrated for hydrogen concentrations measurement directly in transformer oil and in the gas space above it use a highly sensitive (at the level of units and fractions of ppm) gas sensor based on a metal-insulator-semiconductor capacitive structure (MIS sensor). The results obtained can be used in online monitoring systems and predicting the power transformers integral performance, in particular those that have been put into operation long ago, by tracking slow and invisible at the initial stage aging processes of current-carrying connections and structural elements.
Methods and Tools for Evaluating the Characteristics of MIS-Capacitor Gas Sensors
Based on the electrophysical models of electrical characteristics of MIS-capacitor sensors, we analyze the features of methods and tools for evaluating metrological characteristics of the sensors in general terms and using the example of hydrogen-sensitive sensor elements with Pd-SiO2-Si structure. Recommendations are given on the choice of optimal circuit modes for determining the performance characteristics of the sensors of concentrations of hydrogen-containing gases and of gas analyzers for various purposes.
СОЧЕТАНИЕ МЕТОДОВ ЛАЗЕРНОГО И МАГНЕТРОННОГО РАСПЫЛЕНИЯ ДЛЯ ИЗГОТОВЛЕНИЯ ТВЕРДОТЕЛЬНЫХ ЕМКОСТНЫХ ДАТЧИКОВ ГАЗА
Исследована чувствительность датчиков на основе МДП-структур Pt-PdO-SiO2-Si-Pt к содержанию Н2, H2S, NO2 и NH3 в воздухе в зависимости от режимов термической постобработки в среде чистого воздуха и в смеси с водородом.