Персона: Литвинов, Артур Васильевич
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Институт лазерных и плазменных технологий
Стратегическая цель Института ЛаПлаз – стать ведущей научной школой и ядром развития инноваций по лазерным, плазменным, радиационным и ускорительным технологиям, с уникальными образовательными программами, востребованными на российском и мировом рынке образовательных услуг.
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- ПубликацияТолько метаданныеImprovement of field effect capacity type gas sensor thermo inertial parameters by using laser micromilling technique(2020) Samotaev, N.; Oblov, K.; Etrekova, M.; Veselov, D.; Ivanova, A.; Litvinov, A.; Самотаев, Николай Николаевич; Облов, Константин Юрьевич; Этрекова, Майя Оразгельдыевна; Веселов, Денис Сергеевич; Иванова, Анастасия Владимировна; Литвинов, Артур Васильевич© 2020 Trans Tech Publications Ltd, Switzerland.This paper presents a verification of technology aspects for improvement of field effect capacity type gas sensor parameters by using laser micromilling technique for fabrication ceramic surface mounting device (SMD) package and microheater for sustentation working temperature of metal-insulator-semiconductor structure (MIS structure). Innovative claims include: demonstration of flexible opportunities for new digital fabrication process flows based on laser micromilling tech: fast design of SMD sensor 3-D model, flexible changing topology of microheater, thick and thin film technology combination for reducing of power consumption. The results show possibility to fast fabrication functional sensor in customer ceramic SMD package with base 9x9 mm with twice reduced power consumption and improving mechanical properties compare with classical metal-glass microelectronic packages using before for such type sensors.
- ПубликацияТолько метаданныеThe detection of nitro compounds by using MIS-sensor(2019) Mikhailov, A. A.; Litvinov, A. V.; Samotaev, N. N.; Etrekova, M. O.; Литвинов, Артур Васильевич; Самотаев, Николай Николаевич; Этрекова, Майя Оразгельдыевна© 2019 Published under licence by IOP Publishing Ltd. It was shown the possibility of using MIS-sensors as detectors sensitive elements of the nitro-containing organic trace. The detection is carried out due to the nitro groups, formed during the reaction of pyrolysis of the nitro compounds molecules.
- ПубликацияТолько метаданныеSnO2-Pd as a Gate Material for the Capacitor Type Gas Sensor(2019) Samotaev, N.; Oblov, K.; Litvinov, A.; Etrekova, M.; Самотаев, Николай Николаевич; Облов, Константин Юрьевич; Литвинов, Артур Васильевич; Этрекова, Майя Оразгельдыевна© 2019 IEEE.The article describes the result of the use SnO2-Pd thin films as a gate for structure measured ppb range of NO2 gas by the capacitive method. The technological aspects of fabrication SnO2-Pd gate and one comparison by metrological parameters with the classical Pd gate field effect sensor are discussed. The use of SnO2-Pd material allows improvement in sensitivity of NO2 by an order of magnitude compare the classical Pd based gate field effect sensors.
- ПубликацияТолько метаданныеCluster Model of the Mechanism of Sensitivity of Gas Sensors Based on MIS Structures(2019) Litvinov, A. V.; Samotaev, N. N.; Etrekova, M. O.; Klishin, Y. A.; Korolev, N. A.; Литвинов, Артур Васильевич; Самотаев, Николай Николаевич; Этрекова, Майя Оразгельдыевна; Королев, Николай Анатольевич© 2019, Pleiades Publishing, Ltd.A cluster model of the mechanism of sensitivity to gases is proposed, according to which the change in the electric capacity of a MIS sensor under the action of gas is caused by a change in the dielectric constant of the metal — dielectric transition layer under the action of gas molecules. The dielectric constant of the transition layer changes due to the rearrangement of the electronic structure of the traps.
- ПубликацияТолько метаданныеInvestigation of Selectivity and Reproducibility Characteristics of Gas Capacitive MIS Sensors(2021) Mikhailov, A.; Etrekova, M.; Litvinov, A.; Samotaev, N.; Filipchuk, D.; Oblov, K.; Этрекова, Майя Оразгельдыевна; Литвинов, Артур Васильевич; Самотаев, Николай Николаевич; Облов, Константин Юрьевич© 2021, Springer Nature Switzerland AG.The influence of the dielectric material (Ta2O5, Si3N4, (ZrO2)10%(TiO2)90% and SnO2), its formation methods (pulsed laser deposition, plasma-chemical method, sol-gel method, reactive magnetron sputtering) and technological post-processing (forming gas annealing) has been investigated. It is shown that different methods of dielectric material obtaining affect the temperature of maximum sensitivity and response time of gas sensors. However, there is no significant improvement in selectivity in the ppb concentration range. A two-electrode capacitive sensor element was manufactured and tested. The using of two-electrode MIS sensor gives some improvement in selectivity but does not justify the cost of increasing the size and power consumption of the sensors. The reproducibility of characteristics of MIS structures of Pd-SiO2-Si and Pd-Ta2O5-SiO2-Si in sensitivity and response time was studied. More than 90% of suitable MIS structures after forming gas annealing (40 h at TMIS = 130 ℃ in a medium of 2% vol.d. H2 + air) have limit of hydrogen detection 150 ± 75 ppb and characteristic response times to supply and removal of 5 ppm H2 τ0.9 = 5 ± 3 min and τ0.1 = 8 ± 5 min, respectively. It is shown that if the sensor has the greatest sensitivity to hydrogen, then for all other gases it will be also the most sensitive among others. The stability to the effects of NO2 concentration overload was investigated. It is shown that the 1000-fold NO2 concentration overload does not poison the sensor.
- ПубликацияТолько метаданныеHydrogen concentration control in oil-filled power transformers using field effect capacitive gas sensors(2021) Litvinov, A.; Samotaev, N.; Etrekova, M.; Ivanova, A.; Filipchuk, D.; Литвинов, Артур Васильевич; Самотаев, Николай Николаевич; Этрекова, Майя Оразгельдыевна; Иванова, Анастасия Владимировна© 2021 The Author(s).A simple method is demonstrated for hydrogen concentrations measurement directly in transformer oil and in the gas space above it use a highly sensitive (at the level of units and fractions of ppm) gas sensor based on a metal-insulator-semiconductor capacitive structure (MIS sensor). The results obtained can be used in online monitoring systems and predicting the power transformers integral performance, in particular those that have been put into operation long ago, by tracking slow and invisible at the initial stage aging processes of current-carrying connections and structural elements.
- ПубликацияТолько метаданныеMethods and Tools for Evaluating the Characteristics of MIS-Capacitor Gas Sensors(2022) Podlepetsky, B. I.; Samotaev, N. N.; Etrekova, M. O.; Litvinov, A. V.; Подлепецкий, Борис Иванович; Самотаев, Николай Николаевич; Этрекова, Майя Оразгельдыевна; Литвинов, Артур ВасильевичBased on the electrophysical models of electrical characteristics of MIS-capacitor sensors, we analyze the features of methods and tools for evaluating metrological characteristics of the sensors in general terms and using the example of hydrogen-sensitive sensor elements with Pd-SiO2-Si structure. Recommendations are given on the choice of optimal circuit modes for determining the performance characteristics of the sensors of concentrations of hydrogen-containing gases and of gas analyzers for various purposes.
- ПубликацияОткрытый доступСтабилизация характеристик и модель механизма чувствительности МДП-сенсоров к газам(МИФИ, 2008) Литвинов, А. В.; Литвинов, Артур Васильевич; Николаев, И. Н.
- ПубликацияТолько метаданныеSelective Ammonia Detection by Field Effect Gas Sensor as an Instrumentation Basis for HP-Infection Primary Diagnosis(2022) Mikhailov, A.; Samotaev, N.; Etrekova, M.; Litvinov, A.; Самотаев, Николай Николаевич; Этрекова, Майя Оразгельдыевна; Литвинов, Артур Васильевич© 2022, The Author(s), under exclusive license to Springer Nature Switzerland AG.The clinical tests of device based on Metal Insulator Semiconductor Field Effect (MIS-FE) gas sensor for Helicobacter pylori infection diagnostics (HP-infection) are done by breath test method. This method is based on detecting increase ammonia concentration in patient’s exhaled air after reception of carbamide water solution. The device’s stable operation is based on MIS-FE gas sensor’s high sensitivity to ammonia, sensor’s parameters stability as well as especially developed two channels gas sampling system.
- ПубликацияОткрытый доступCombination of Material Processing and Characterization Methods for Miniaturization of Field-Effect Gas Sensor(2023) Samotaev, N.; Litvinov, A.; Oblov, K.; Etrekova, M.; Podlepetsky, B.; Dzhumaev, P. S.; Самотаев, Николай Николаевич; Литвинов, Артур Васильевич; Облов, Константин Юрьевич; Этрекова, Майя Оразгельдыевна; Подлепецкий, Борис Иванович; Джумаев, Павел СергеевичThe technological approach for the low-scale production of field-effect gas sensors as electronic components for use in non-lab ambient environments is described. In this work, in addition to the mechanical protection of a gas-sensitive structure, an emphasis was also placed on the very topical issue of thermal stabilization around the one temperature point, even if it is several degrees higher than the surrounding one, which will probably also be useful for any type of application for many types of field-effect sensors. Considerable attention was paid to the characterization of the results obtained by various invasive and non-invasive methods for diagnosing the manufactured construction. The technology described in this article occupies an intermediate position between laboratory samples tested in clean rooms with stable ambient atmospheres, and experimental and small-scale production sensors designed for real operating conditions to solve the narrow application of measuring low concentrations of hydrogen.