Персона:
Харьков, Максим Михайлович

Организационные подразделения

Организационная единица

Институт лазерных и плазменных технологий

Стратегическая цель Института ЛаПлаз – стать ведущей научной школой и ядром развития инноваций по лазерным, плазменным, радиационным и ускорительным технологиям, с уникальными образовательными программами, востребованными на российском и мировом рынке образовательных услуг.

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Харьков

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Максим Михайлович

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Теперь показываю 1 - 10 из 33

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Preparation of Alumina Thin Films by Reactive Modulated Pulsed Power Magnetron Sputtering with Millisecond Pulses
(2024) Tumarkin, A. V.; Kolodko, D. V.; Kharkov, M. M.; Stepanova, T. V.; Kaziev, A. V.; Samotaev, N. N.; Oblov, K. Yu.; Тумаркин, Александр Владимирович; Колодко, Добрыня Вячеславич; Харьков, Максим Михайлович; Степанова, Татьяна Владимировна; Казиев, Андрей Викторович; Самотаев, Николай Николаевич; Облов, Константин Юрьевич
Thispaper aims to investigate the quality of thin alumina films deposited on glass samples using magnetron sputtering in the reactive modulated pulsed power mode (MPPMS) and evaluate the process productivity. The aluminum target was sputtered in Ar/O2 gas mixtures with different fractions of oxygen in the total gas flow, in the fixed pulsed voltage mode. The pulse-on duration was varied between 5 and 10 ms, while the pulse-off time was 100 or 200 ms. The dependences of mass deposition rate and discharge current on the oxygen flow were measured, and the specific deposition rate values were calculated. Prepared coatings had a thicknesses of 100ў??400 nm. Their quality was assessed by scratch testing and by measuring density, refractory index, and extinction coefficient for different power management strategies. The strong influence of pulse parameters on the coating properties was observed, resulting in a maximum density of 3.6 g/cm3 and a refractive index of 1.68 for deposition modes with higher duty cycle values. Therefore, adjusting the pulse-on and pulse-off periods in MPPMS can be used not only to optimize the deposition rate but also as a tool to tune the optical characteristics of the films. The performance of the studied deposition method was evaluated by comparing the specific growth rates of alumina coatings with the relevant data for other magnetron discharge modes. In MPPMS, a specific deposition rate of 200 nm/min/kW was obtained for highly transparent Al2O3, without using any dedicated feedback loop system for oxygen pressure stabilization, which makes MPPMS superior to short-pulse high-power impulse magnetron sputtering (HiPIMS) modes.
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Diagnostics of ion fluxes in low-temperature laboratory and industrial plasmas
(2019) Kolodko, D, V.; Ageychenkov, D. G.; Kaziev, A, V.; Leonova, K. A.; Kharkov, M. M.; Tumarkin, A. V.; Колодко, Добрыня Вячеславич; Агейченков, Дмитрий Григорьевич; Казиев, Андрей Викторович; Харьков, Максим Михайлович; Тумаркин, Александр Владимирович
We studied the ion fluxes on metal surfaces in the inductively coupled plasma reactor as a test facility. The gas mixture of argon and nitrogen was used, with 0.44 Pa total pressure. The radiofrequency power was varied in a wide range (250-2000 W). The ion fluxes were sampled in situ using a specially designed electrostatic extractor and then analyzed with a custom-built magnetic sector mass-separator. The gas composition was independently monitored by the quadrupole analyzer. All measurements were accompanied by optical emission spectroscopy (OES). The correlations of measured optical and corpuscular data are discussed. The conversion function linking optical and corpuscular intensities for Ar/N-2 radiofrequency discharge was determined.
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Effect of high-temperature oxidation on the surface properties as applied to quenching of high-temperature bodies
(2021) Molotova, I. A.; Zabirov, A. R.; Yagov, V. V.; Terentyev, E. V.; Tumarkin, A. V.; Kharkov, M. M.; Тумаркин, Александр Владимирович; Харьков, Максим Михайлович
© 2021 Institute of Physics Publishing. All rights reserved.This paper contains the results of studying the surface properties before and after high-temperature oxidation. For this, the plate zirconium samples with chromium, gold and silver coatings were prepared. Cut profiles of the samples were obtained to study the structure of coatings and the thickness of the oxide layer. The measurements of contact angles were carried out. The results showed that a porous heterogeneous oxide layer was formed on the samples after high-temperature oxidation. At the same time, the wettability of the samples was improved. The thickness of the oxide layer on the chrome-coated zirconium sample was the smallest. Using of electroplated silver coating for experiments involving heating to high temperatures seems inappropriate because it was damaged after the oxidation tests. It is assumed that the main factor which influence on the rise of the transition temperature to the intensive cooling regime during quenching is the appearance of the oxide layer, rather than the improved wettability and wickability. High-temperature oxidation leads to the simultaneous formation of an oxide layer with a low thermal effusivity and to an improvement in wettability, therefore the contribution of each of these two effects on quenching can be confused or overestimated.
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Modeling of cracking behavior of CrAlN coatings on silicon during micro- and nanoindentation
(2024) Kharkov, M. M.; Tumarkin, A. V.; Prosolov, A. A.; Kabanov, G. A.; Kolodko, D. V.; Tarasov, B. A.; Irmagambetova, S. M.; Kaziev, A. V.; Харьков, Максим Михайлович; Тумаркин, Александр Владимирович; Кабанов, Глеб Алексеевич; Колодко, Добрыня Вячеславич; Тарасов, Борис Александрович; Ирмагамбетова, Сауле Муханбетовна; Казиев, Андрей Викторович
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Current-voltage characteristics of an impulse magnetron discharge in target material vapor
(2020) Kaziev, A. V.; Leonova, K. A.; Kharkov, M. M.; Tumarkin, A. V.; Kolodko, D. V.; Khomyakov, A. Y.; Ageychenkov, D. G.; Казиев, Андрей Викторович; Харьков, Максим Михайлович; Тумаркин, Александр Владимирович; Колодко, Добрыня Вячеславич; Агейченков, Дмитрий Григорьевич
© Published under licence by IOP Publishing Ltd.The magnetron discharge with hot (uncooled) target in an impulse mode has been experimentally investigated. The I-V characteristics have been measured depending on the magnetic field strength for three target materials: copper, chromium, and silicon. For melted copper and hot chromium targets, stable gasless (no argon) operation of the magnetron has been demonstrated with maximum impulse power densities about 2.5 kW/cm2 (averaged over the racetrack area). For silicon target, maximum impulse power density was 1.5 kW/cm2 at low argon pressure (0.1 Pa). The magnetic field dependences of discharge parameters have shown the associated changes in differential plasma impedance.
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Effects of Ar ion irradiation in an ICP discharge on the titanium surface topology
(2020) Chernyh, N. A.; Kharkov, M. M.; Kaziev, A. V.; Danilyuk, D. V.; Kukushkina, M. S.; Tumarkin, A. V.; Kolodko, D. V.; Харьков, Максим Михайлович; Казиев, Андрей Викторович; Кукушкина, Маргарита Сергеевна; Тумаркин, Александр Владимирович; Колодко, Добрыня Вячеславич
© 2020 Elsevier B.V.VT1-0 (Russian equivalent of Grade 2) titanium surfaces were modified under argon ion bombardment from the low-pressure inductively coupled plasma (ICP). The ion processing allowed us to prepare various types of structures on titanium with controlled characteristic dimensions at nano- and miscroscale (from tens of nm to 3 µm). The hillock, porous, conical, wall/cell structures as well as their combinations have been obtained. The topology type and the characteristic dimensions of surface features depend on the current density js, Ar ion energy Ei, irradiation fluence Φ (or processing time t), and the sample temperature T during the treatment. The microstructures appear on the surface provided the titanium sample is irradiated at temperatures below 900 °C. The sample temperature was determined by both the average current density (jsav from 0.2 to 20 mA/cm2) and the ion energy (Ei from 150 to 1500 eV). A certain fluence is required for uniform surface coverage with microstructures. We suppose that the titanium surface texturing is a result of a complex interplay of the following mechanisms: sputtering, re-sputtering (shadowing), crystal lattice transformation, accumulation and annihilation of defects, and hypothetically, argon retention.
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Helium retention in tungsten under plasma and ion beam irradiation and its impact on surface morphology
(2020) Gasparyan, Y.; Ryabtsev, S.; Efimov, V.; Harutyunyan, Z.; Aksenova, A.; Poskakalov, A.; Kaziev, A.; Kharkov, M.; Ogorodnikova, O.; Pisarev, A.; Гаспарян, Юрий Микаэлович; Ефимов, Виталий Сергеевич; Арутюнян, Зорий Робертович; Аксенова, Александра Сергеевна; Казиев, Андрей Викторович; Харьков, Максим Михайлович; Огородникова, Ольга Вячеславовна; Писарев, Александр Александрович
Helium (He) is a product of deuterium-tritium (DT)-fusion reaction and will be a natural impurity in DT plasma in future fusion devices. He retention in tungsten irradiated by plasma and mass-separated ions in a wide temperature range (300-1200 K) was investigated by means of thermal desorption spectroscopy (TDS). He retention did not exceed the level of 1.5 x 10(21) He m(-2) for all investigated samples. A significant effect of air exposure on TDS spectra was demonstrated. In contrast to in situ TDS measurements, He release after interaction with the air started from similar to 400 K, even in the case of high temperature irradiation. Changes in surface morphology were analyzed by secondary electron microscopy. Blisters were found at the surface after ion irradiation at low temperatures. Acceleration of surface modification and more complex surface morphology was observed in the case of irradiation at temperatures above 1000 K.
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Characterization of millisecond-scale high-power impulse magnetron discharge in helium
(2020) Kaziev, A. V.; Kolodko, D. V.; Kharkov, M. M.; Rykunov, G. I.; Sergeev, N. S.; Tumarkin, A. V.; Казиев, Андрей Викторович; Колодко, Добрыня Вячеславич; Харьков, Максим Михайлович; Сергеев, Никита Сергеевич; Тумаркин, Александр Владимирович
© 2021 IEEEImpulse magnetron discharges with millisecond-scale pulses-extended duration modes of technological high-power impulse magnetron sputtering (HiPIMS)-have promising applications in pulsed plasma facilities of different kinds due to high ionization degree (up to 90%), suitable duration, and scalable hardware design. Depending on operating conditions, at the same power level, two distinct diffuse regimes can be distinguished: the one with intense target sputtering-long HiPIMS (L-HiPIMS),-and the non-sputtering low-voltage one (non-sputtering magnetron discharge). The majority of existing studies of these discharge forms were made for argon working gas. For a number of prospective high-power pulsed plasma applications (e. g. pulsed plasma accelerators and thrusters), however, the option of using light gases is preferable. Here, the operation of a millisecond-scale impulse magnetron discharge (L-HiPIMS) in helium has been examined. The plasma parameters (electron density, electron temperature) were measured in a time-resolved fashion with a Langmuir probe. The electrical measurements were accompanied with optical emission spectroscopy. The use of the long pulsed modes enables achieving high plasma density and accelerating the ion flux with a peak energy of ~ 10 eV.
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Deuterium and helium retention in W with and without He-induced W ‘fuzz’ exposed to pulsed high-temperature deuterium plasma
(2019) Tokitani, M.; Ogorodnikova, O. V.; Klimov, K. S.; Poskakalov, A. G.; Kaziev, A. V.; Kharkov, M. M.; Efimov, V. S.; Gasparyan, Y. M.; Volkov, N. V.; Alimov, V. K.; Огородникова, Ольга Вячеславовна; Климов, Николай Сергеевич; Казиев, Андрей Викторович; Харьков, Максим Михайлович; Ефимов, Виталий Сергеевич; Гаспарян, Юрий Микаэлович
© 2018 Elsevier B.V. In the present work, helium (He) was incorporated into tungsten (W) samples by inductively coupled plasma (ICP) source above the threshold of He-induced W ‘fuzz’ formation on W surface. Then, W samples with and without nano-structured W ‘fuzz’ were exposed to pulsed heat loads using deuterium (D) plasma in quasi-stationary high-current plasma gun QSPA-T. The pulse duration was 1 ms and number of pulses was varied from one to thirty to simulate ITER transient events with surface heat load parameters relevant to edge-localized-mode (ELM) impacts. The irradiation was performed below and above the W melting threshold. The D and He retention in each irradiated sample was measured by a method of thermal desorption spectroscopy. We examined the impact of (i) ELMs-like events and (ii) formation of He-induced nano-structured ‘fuzz’ on the D retention in W. We found that the D retention was the highest for samples irradiated by plasma gun above the melting threshold after thirty pulses. Moreover, the D retention after 10 pulses of deuterium plasma gun exposure was higher than that after stationary low-energy plasma exposure at sample temperature of either 600 or 700 K indicating the dominate influence of ELM's-like events on the D retention compared to normal operation regime. The D retention in W samples with the presence of He-induced W ‘fuzz’ was slightly smaller than without that after one pulse of plasma gun exposure with heat load below the W melting temperature. The W ‘fuzz’ was not disappear in this loading conditions, only the length and thickness of nano-structured W fibres were reduced by factors of ∼4 and ∼2, respectively. The He concentration in W with W ‘fuzz’ was decreased by a factor of about 3 after one pulse of plasma gun exposure. The results obtained give possibility to assess the particle retention in divertor areas subjected to high thermal loads at different operation regimes.
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SURFACE MODIFICATIONS OF W-BASED MATERIALS UNDER HELIUM AND DEUTERIUM ION IMPLANTATION
(НИЯУ МИФИ, 2021) Ogorodnikova, O. V.; Klimov, N. S.; Gasparyan, Yu. M.; Harutyunyan, Z. R.; Efimov, V. S.; Kovalenko, D.; Gutarov, K.; Poskakalov, А. G.; Kharkov, M. M.; Kaziev, A. V.; Харьков, Максим Михайлович; Гаспарян, Юрий Микаэлович; Казиев, Андрей Викторович; Ефимов, Виталий Сергеевич; Огородникова, Ольга Вячеславовна
In a thermonuclear reactor, materials will be irradiated with hydrogen isotopes and helium (He), neutrons, and heat fluxes. Tungsten (W) and dense nano-structured tungsten (CMSII) coatings are used as plasma-facing materials in current tokamaks and suggested to be used for future fusion devices. In this regard, the study of the accumulation of He and deuterium (D) in W based materials and corresponding surface modifications under normal operation conditions and transient events appears necessary for assessment of safety of fusion reactor due to the radioactivity of tritium and material performance and for the plasma fuel balance. Therefore, in this work, irradiation of W-based materials with D and He ions in stationary regime and in quasi-stationary high-current plasma gun QSPA-T below and above the melting threshold has been performed. In QSPA-T, a pulse duration was 1 ms and number of pulses was varied from one to thirty. In stationary plasma loads, ion energy was varied from 20 to 3 keV, temperature 300-1200 K and flux/fluence 1017-1021 at/m2s/1020-1025 at/m2.