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Этрекова, Майя Оразгельдыевна

Организационные подразделения

Организационная единица

Институт нанотехнологий в электронике, спинтронике и фотонике

Институт ИНТЭЛ занимается научной деятельностью и подготовкой специалистов в области исследования физических принципов, проектирования и разработки технологий создания компонентной базы электроники гражданского и специального назначения, а также построения современных приборов на её основе. Наша основная цель – это создание и развитие научно-образовательного центра мирового уровня в области наноструктурных материалов и устройств электроники, спинтроники, фотоники, а также создание эффективной инновационной среды в области СВЧ-электронной и радиационно-стойкой компонентной базы, источников ТГц излучения, ионно-кластерных технологий материалов.

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Этрекова

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Майя Оразгельдыевна

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Теперь показываю 1 - 10 из 22

Открытый доступ
Structure and Technological Parameters’ Effect on MISFET-Based Hydrogen Sensors’ Characteristics
(2023) Podlepetsky, B.; Samotaev, N.; Etrekova, M.; Litvinov, A.; Подлепецкий, Борис Иванович; Самотаев, Николай Николаевич; Этрекова, Майя Оразгельдыевна; Литвинов, Артур Васильевич
The influence of structure and technological parameters (STPs) on the metrological characteristics of hydrogen sensors based on MISFETs has been investigated. Compact electrophysical and electrical models connecting the drain current, the voltage between the drain and the source and the voltage between the gate and the substrate with the technological parameters of the n-channel MISFET as a sensitive element of the hydrogen sensor are proposed in a general form. Unlike the majority of works, in which the hydrogen sensitivity of only the threshold voltage of the MISFET is investigated, the proposed models allow us to simulate the hydrogen sensitivity of gate voltages or drain currents in weak and strong inversion modes, taking into account changes in the MIS structure charges. A quantitative assessment of the effect of STPs on MISFET performances (conversion function, hydrogen sensitivity, gas concentration measurement errors, sensitivity threshold and operating range) is given for a MISFET with a Pd-Ta2O5-SiO2-Si structure. In the calculations, the parameters of the models obtained on the basis of the previous experimental results were used. It was shown how STPs and their technological variations, taking into account the electrical parameters, can affect the characteristics of MISFET-based hydrogen sensors. It is noted, in particular, that for MISFET with submicron two-layer gate insulators, the key influencing parameters are their type and thickness. Proposed approaches and compact refined models can be used to predict performances of MISFET-based gas analysis devices and micro-systems.
Только метаданные
Selective Ammonia Detection by Field Effect Gas Sensor as an Instrumentation Basis for HP-Infection Primary Diagnosis
(2022) Mikhailov, A.; Samotaev, N.; Etrekova, M.; Litvinov, A.; Самотаев, Николай Николаевич; Этрекова, Майя Оразгельдыевна; Литвинов, Артур Васильевич
© 2022, The Author(s), under exclusive license to Springer Nature Switzerland AG.The clinical tests of device based on Metal Insulator Semiconductor Field Effect (MIS-FE) gas sensor for Helicobacter pylori infection diagnostics (HP-infection) are done by breath test method. This method is based on detecting increase ammonia concentration in patient’s exhaled air after reception of carbamide water solution. The device’s stable operation is based on MIS-FE gas sensor’s high sensitivity to ammonia, sensor’s parameters stability as well as especially developed two channels gas sampling system.
Открытый доступ
Measurement of Low-Concentration Hydrogen in Inert Gas Within a Small Closed Volume
(2025) Ivanov, G. A.; Shornikov, D. P.; Samotaev, N. N.; Oblov, K. Y.; Etrekova, M. O.; Litvinov, A. V.; Иванов, Георгий Андреевич; Шорников, Дмитрий Павлович; Самотаев, Николай Николаевич; Облов, Константин Юрьевич; Этрекова, Майя Оразгельдыевна; Литвинов, Артур Васильевич
Открытый доступ
СОЧЕТАНИЕ МЕТОДОВ ЛАЗЕРНОГО И МАГНЕТРОННОГО РАСПЫЛЕНИЯ ДЛЯ ИЗГОТОВЛЕНИЯ ТВЕРДОТЕЛЬНЫХ ЕМКОСТНЫХ ДАТЧИКОВ ГАЗА
(НИЯУ МИФИ, 2025) ЛИТВИНОВ, А. В.; ЭТРЕКОВА, М. О.; САМОТАЕВ, Н. Н.; ОБЛОВ, К. Ю.; ПЕВЦОВ, И. Д.; Облов, Константин Юрьевич; Самотаев, Николай Николаевич; Литвинов, Артур Васильевич; Этрекова, Майя Оразгельдыевна; Певцов, Илья Денисович
Исследована чувствительность датчиков на основе МДП-структур Pt-PdO-SiO2-Si-Pt к содержанию Н2, H2S, NO2 и NH3 в воздухе в зависимости от режимов термической постобработки в среде чистого воздуха и в смеси с водородом.
Только метаданные
SnO2-Pd as a Gate Material for the Capacitor Type Gas Sensor
(2019) Samotaev, N.; Oblov, K.; Litvinov, A.; Etrekova, M.; Самотаев, Николай Николаевич; Облов, Константин Юрьевич; Литвинов, Артур Васильевич; Этрекова, Майя Оразгельдыевна
© 2019 IEEE.The article describes the result of the use SnO2-Pd thin films as a gate for structure measured ppb range of NO2 gas by the capacitive method. The technological aspects of fabrication SnO2-Pd gate and one comparison by metrological parameters with the classical Pd gate field effect sensor are discussed. The use of SnO2-Pd material allows improvement in sensitivity of NO2 by an order of magnitude compare the classical Pd based gate field effect sensors.
Только метаданные
Parameter studies of ceramic MEMS microhotplates fabricated by laser micromilling technology
(2020) Samotaev, N.; Oblov, K.; Etrekova, M.; Veselov, D.; Gorshkova, A.; Самотаев, Николай Николаевич; Облов, Константин Юрьевич; Этрекова, Майя Оразгельдыевна; Веселов, Денис Сергеевич
© 2020 Trans Tech Publications Ltd, Switzerland.This paper presents a modeling of technology aspects for fabrication ceramic microelectromechanical systems (MEMS) microhotplate and surface mounting device (SMD) packaging for (MOX) gas sensors applications. Innovative claims include: demonstration of flexible opportunities for new fabrication process flows based on laser micromilling tech; modeling of power consumption MEMS microhotplate depending on the thickness and topology; demonstration of necessity changing thick film technology of metallization to vacuum sputtering by reducing of power consumption. The results show possibility to fast fabrication of different topologies for ceramic MEMS microhotplate in form-factor of SOT-23 type SMD package.
Только метаданные
The detection of nitro compounds by using MIS-sensor
(2019) Mikhailov, A. A.; Litvinov, A. V.; Samotaev, N. N.; Etrekova, M. O.; Литвинов, Артур Васильевич; Самотаев, Николай Николаевич; Этрекова, Майя Оразгельдыевна
© 2019 Published under licence by IOP Publishing Ltd. It was shown the possibility of using MIS-sensors as detectors sensitive elements of the nitro-containing organic trace. The detection is carried out due to the nitro groups, formed during the reaction of pyrolysis of the nitro compounds molecules.
Открытый доступ
Prototype of nitro compound vapor and trace detector based on a capacitive MIS sensor
(2020) Mikhailov, A.; Samotaev, N.; Litvinov, A.; Etrekova, M.; Oblov, K.; Filipchuk, D.; Самотаев, Николай Николаевич; Литвинов, Артур Васильевич; Этрекова, Майя Оразгельдыевна; Облов, Константин Юрьевич
© 2020 by the authors. Licensee MDPI, Basel, Switzerland.A prototype of a nitro compound vapor and trace detector, which uses the pyrolysis method and a capacitive gas sensor based on the metal–insulator–semiconductor (MIS) structure type Pd–SiO2 –Si, was developed and manufactured. It was experimentally established that the detection limit of trinitrotoluene trace for the detector prototype is 1 × 10−9 g, which corresponds to concentration from 10−11 g/cm3 to 10−12 g/cm3. The prototype had a response time of no more than 30 s. The possibility of further improving the characteristics of the prototype detector by reducing the overall dimensions and increasing the sensitivity of the MIS sensors is shown.
Открытый доступ
Detection of Chlorine by field effect sensor
(2019) Samotaev, N. N.; Litvinov, A. V.; Etrekova, M. O.; Самотаев, Николай Николаевич; Литвинов, Артур Васильевич; Этрекова, Майя Оразгельдыевна
© Published under licence by IOP Publishing Ltd.The gas analytical system for chlorine gas measurement based on metal-insulator-semiconductor field effect (MIS FE) type sensor has been developed. High sensitivity of MIS FE sensor to chlorine allows measuring concentrations in the sub-ppb level and to be stable for overload hydrogen gas concentration typically present in industrial electrolysis application. With the pulse heating mode, the response and relaxation times of the MIS sensor are reduced by an order of magnitude which gives chance to use one for high precision environmental control.
Только метаданные
Printed Miniaturized Platinum Heater on Ultra-Thin Ceramic Membrane for MOX Gas Sensors
(2021) Fritsch, M.; Mosch, S.; Vinnichenko, M.; Trofimenko, N.; Samotaev, N.; Etrekova, M.; Filipchuk, D.; Самотаев, Николай Николаевич; Этрекова, Майя Оразгельдыевна
© 2021, Springer Nature Switzerland AG.The combination of aerosol-jet printing and laser micromilling technology makes it possible to fabricate the ceramics MEMS platforms and SMD packages by using their digital models. It is shown that combination of platinum metallization for the heater and ceramic materials is the best choice for the microelectronic MEMS actuator and sensor package which should be installed in devices aimed for work under harsh environmental conditions. The developed metal-oxide semiconductor gas sensors in miniaturized package with low power consumption can be extremely useful in modern agriculture facilities. The idea of their integration into livestock facilities, food-storage, forestry, fish farming and horticulture seems quite promising for developing smart agriculture, where devices must work under harsh environmental conditions such as high humidity level and temperature. To fulfill the demand of these types of sensors their mass production should be cheap and not require a clean room. In this work we present a way of fabrication of all parts of gas sensor including a package using only one setup, which allows us to reduce the cost of the final product and simplify the whole production process in order to make the technology available for many different agricultural applications.