Персона: Веселов, Денис Сергеевич
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Институт нанотехнологий в электронике, спинтронике и фотонике
Институт ИНТЭЛ занимается научной деятельностью и подготовкой специалистов в области исследования физических принципов, проектирования и разработки технологий создания компонентной базы электроники гражданского и специального назначения, а также построения современных приборов на её основе.
Наша основная цель – это создание и развитие научно-образовательного центра мирового уровня в области наноструктурных материалов и устройств электроники, спинтроники, фотоники, а также создание эффективной инновационной среды в области СВЧ-электронной и радиационно-стойкой компонентной базы, источников ТГц излучения, ионно-кластерных технологий материалов.
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Денис Сергеевич
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- ПубликацияОткрытый доступТехнология изготовления диэлектрических мембранных конструкций для формирования чувствительных элементов датчиков концентрации газа(НИЯУ МИФИ, 2013) Веселов, Д. С.; Веселов, Денис Сергеевич; Воронов, Ю. А.
- ПубликацияТолько метаданныеAutomated unit of the chemical wet etching(2019) Sukhoroslova, Y. V.; Veselov, D. S.; Voronov, Y. A.; Веселов, Денис Сергеевич; Воронов, Юрий Александрович© Published under licence by IOP Publishing Ltd. This paper is devoted to the development of wet etching unit and its control system. The experimental model represents the reaction chamber, equipped with the stirrer and steam-gas condenser, located inside the heated chamber. The unit is also equipped with heat-insulated reservoirs for preheating of etchants and water. The control system provides automated supplying of liquids into the reaction chamber. This allows realizing multistage etching in single technological cycle with etchants replacement and substrate washing, without its extraction from the reaction chamber. With using the unit was studied deep anisotropic etching of silicon in various alkaline etchants. Was revealed, that unit provides the uniformity of etched surface on the level of about 1 μm.
- ПубликацияТолько метаданныеSecond International Telecommunication Conference on Advanced Micro- and Nanoelectronic Systems and Technologies(2019) Pershenkov, V. S.; Veselov, D. S.; Zebrev, G. I.; Веселов, Денис Сергеевич; Зебрев, Геннадий Иванович
- ПубликацияТолько метаданныеTemperature distribution on dielectric membrane structures for sensitive elements of semiconductor gas sensors(2019) Veselov, D. S.; Voronov, Y. A.; Веселов, Денис Сергеевич; Воронов, Юрий Александрович© 2019 Published under licence by IOP Publishing Ltd. The aim of this article is to show a simulation of temperature distribution on dielectric membrane structures with membranes of different dielectric materials in the measuring mode of a semiconductor gas sensor. The simulation results were obtained using the software package Synopsys TCAD. In various moments of the measuring cycle were obtained two-dimensional temperature distributions on membrane structures. Dependencies of temperature versus time for the variety of the coordinates on membranes, temperature versus coordinates at the sensitive layer area's highest heat value and temperature versus time in the center of the membranes are presented. Recommendations are given for the selection of membrane material for the heat-insulating membrane structure of sensitive elements for semiconductor gas sensors.
- ПубликацияТолько метаданныеSimulation of low energy ion implantation in silicon(2019) Veselov, D. S.; Voronov, Y. A.; Metel, Yu. V.; Веселов, Денис Сергеевич; Воронов, Юрий Александрович© 2019 Published under licence by IOP Publishing Ltd. This report is devoted to simulation of distributions of boron and indium ions implanted into the silicon substrates with energies up to 10 keV. The simulation was conducted immediately after implantation and after subsequent annealing in inert and oxidizing ambient. Post-implant and post-anneal distributions of impurities concentration versus depth were obtained. It was demonstrated, that the super-steep retrograde distribution of indium in silicon is provided exactly by the annealing in an oxidizing ambient. Also, it was demonstrated, that the annealing does not provide the super-steep retrograde distribution of boron in silicon. Thus, it was shown, that indium doping of gate region contributes to suppression of the short-channel effects in nanoscale MOSFETs, unlike boron doping.
- ПубликацияТолько метаданныеTechnology of SMD MOX gas sensors rapid prototyping(2020) Samotaev, N.; Oblov, K.; Veselov, D.; Podlepetsky, B.; Etrekova, M.; Volkov, N.; Zibilyuk, N.; Самотаев, Николай Николаевич; Облов, Константин Юрьевич; Веселов, Денис Сергеевич; Подлепецкий, Борис Иванович; Этрекова, Майя Оразгельдыевна© 2020 Trans Tech Publications Ltd, Switzerland.This work discusses the design of flexible laser micromilling technology for fast prototyping of metal oxide based (MOX) gas sensors in SMD packages as an alternative to traditional silicon clean room technologies. By laser micromilling technology it is possible to fabricate custom Micro Electro Mechanical System (MEMS) microhotplate platform and also packages for MOX sensor, that gives complete solution for its integration in devices using IoT conception. The tests described in the work show the attainability of the stated results for the fabrication of microhotplates.
- ПубликацияТолько метаданныеImprovement of field effect capacity type gas sensor thermo inertial parameters by using laser micromilling technique(2020) Samotaev, N.; Oblov, K.; Etrekova, M.; Veselov, D.; Ivanova, A.; Litvinov, A.; Самотаев, Николай Николаевич; Облов, Константин Юрьевич; Этрекова, Майя Оразгельдыевна; Веселов, Денис Сергеевич; Иванова, Анастасия Владимировна; Литвинов, Артур Васильевич© 2020 Trans Tech Publications Ltd, Switzerland.This paper presents a verification of technology aspects for improvement of field effect capacity type gas sensor parameters by using laser micromilling technique for fabrication ceramic surface mounting device (SMD) package and microheater for sustentation working temperature of metal-insulator-semiconductor structure (MIS structure). Innovative claims include: demonstration of flexible opportunities for new digital fabrication process flows based on laser micromilling tech: fast design of SMD sensor 3-D model, flexible changing topology of microheater, thick and thin film technology combination for reducing of power consumption. The results show possibility to fast fabrication functional sensor in customer ceramic SMD package with base 9x9 mm with twice reduced power consumption and improving mechanical properties compare with classical metal-glass microelectronic packages using before for such type sensors.
- ПубликацияТолько метаданныеParameter studies of ceramic MEMS microhotplates fabricated by laser micromilling technology(2020) Samotaev, N.; Oblov, K.; Etrekova, M.; Veselov, D.; Gorshkova, A.; Самотаев, Николай Николаевич; Облов, Константин Юрьевич; Этрекова, Майя Оразгельдыевна; Веселов, Денис Сергеевич© 2020 Trans Tech Publications Ltd, Switzerland.This paper presents a modeling of technology aspects for fabrication ceramic microelectromechanical systems (MEMS) microhotplate and surface mounting device (SMD) packaging for (MOX) gas sensors applications. Innovative claims include: demonstration of flexible opportunities for new fabrication process flows based on laser micromilling tech; modeling of power consumption MEMS microhotplate depending on the thickness and topology; demonstration of necessity changing thick film technology of metallization to vacuum sputtering by reducing of power consumption. The results show possibility to fast fabrication of different topologies for ceramic MEMS microhotplate in form-factor of SOT-23 type SMD package.
- ПубликацияТолько метаданныеIron collector recycling by electrochlorination method(2020) Tietz, A.; Antonov, A.; Samotaev, N.; Veselov, D.; Kirichenko, A.; Самотаев, Николай Николаевич; Веселов, Денис Сергеевич© 2020 Trans Tech Publications Ltd, Switzerland.Modern methods of recycling spent automotive catalysts and their main disadvantages in industrial practice are considered. The electrochlorination method is proposed as the basis of the platinum-group metals extraction technology after electric arc melting of ceramic catalysts carrier material. The results of the experimental work on the extraction of platinum, palladium, rhodium are analyzed.
- ПубликацияТолько метаданныеEffective method for the platinum group metals extracting from spent diesel autocatalysts(2020) Tietz, A.; Antonov, A.; Samotaev, N.; Tsarev, G.; Veselov, D.; Kirichenko, A.; Самотаев, Николай Николаевич; Веселов, Денис Сергеевич© 2020 Trans Tech Publications Ltd, Switzerland.The team of authors described a solution to the problem of developing a fundamentally new technology for the industrial processing of spent diesel automotive catalysts containing platinum group metals (PGM) and SiC carrier, which has such advantages as carrying out a full processing cycle in one hardware module. The processing of SiC catalyst is extremely difficult by pyrometallurgical methods, but proposed technology is based on the electrochlorination method. The scientific novelty of the proposed method lies in the superposition of two independent electrolysis processes in direct and alternating, with varying frequency, currents under conditions of forced, continuous and complete recondensation of the electrolyte. The study of the diesel catalysts processing by the electrochlorination method have carried out.