2019, Samotaev, N. N., Oblov, K. Y., Ivanova, A. V., Самотаев, Николай Николаевич, Облов, Константин Юрьевич, Иванова, Анастасия Владимировна

© 2019 Published under licence by IOP Publishing Ltd. The article discusses technological and economic aspects of small-scale production of gas MOX sensors. The main technical factors affecting the use of sensors in various applications are described. The perspective laser micro-milling technology for ceramic MEMS producing of microhotplate and SMD package for the MOX sensor is discussed.

2019, Samotaev, N., Oblov, K., Ivanova, A., Gorshkova, A., Podlepetsky, B., Самотаев, Николай Николаевич, Облов, Константин Юрьевич, Иванова, Анастасия Владимировна, Подлепецкий, Борис Иванович

© 2019 IEEE.this work discusses the design of flexible laser micromilling technology for fast prototyping metal oxide based (MOX) gas sensors in SMD packages as a alternative to traditional silicon clean-room technologies. By laser micromilling technology possible to fabricate custom Micro Electro Mechanical System (MEMS) microhotplate platform and also SMD packages for MOX sensor, that gives complete solution for integration one in devices using IoT conception.

2021, Litvinov, A., Samotaev, N., Etrekova, M., Ivanova, A., Filipchuk, D., Литвинов, Артур Васильевич, Самотаев, Николай Николаевич, Этрекова, Майя Оразгельдыевна, Иванова, Анастасия Владимировна

© 2021 The Author(s).A simple method is demonstrated for hydrogen concentrations measurement directly in transformer oil and in the gas space above it use a highly sensitive (at the level of units and fractions of ppm) gas sensor based on a metal-insulator-semiconductor capacitive structure (MIS sensor). The results obtained can be used in online monitoring systems and predicting the power transformers integral performance, in particular those that have been put into operation long ago, by tracking slow and invisible at the initial stage aging processes of current-carrying connections and structural elements.

2020, Samotaev, N. N., Oblov, K. Y., Gorshkova, A. V., Ivanova, A. V., Philipchuk, D. V., Самотаев, Николай Николаевич, Облов, Константин Юрьевич, Иванова, Анастасия Владимировна

© Published under licence by IOP Publishing Ltd.The use of adaptive laser micromilling technology for the fast prototyping ceramic package of electronic components in a miniature surface mount form factor (SMD) is describing. Current experimental results and practical evaluation of one show that using the developed software and hardware is possible successfully producing SMD packages starting from the SOT-723 form-factor in the direction of larger overall dimensions to SOT-475 form-factor. Also discussed are the limiting physical factors arising in the course of the application of laser micromilling technology, which affect the production speed and quality of the resulting product from monolithic ceramics.

2020, Samotaev, N., Oblov, K., Etrekova, M., Ivanova, A., Veselov, D., Gorshkova, A., Самотаев, Николай Николаевич, Облов, Константин Юрьевич, Этрекова, Майя Оразгельдыевна, Иванова, Анастасия Владимировна, Веселов, Денис Сергеевич

© 2020 Trans Tech Publications Ltd, Switzerland.This article presents the technological aspects of experiments on the stable topological patterns formation from thin films of platinum on ceramic membranes. Platinum thin films were deposited by magnetron sputtering on a clean or pre-activated laser ceramics surface. After the deposition of platinum films, the method of various short-term laser irradiation was attempted to form a topological pattern. The results are discussed.

2020, Samotaev, N., Oblov, K., Etrekova, M., Veselov, D., Ivanova, A., Litvinov, A., Самотаев, Николай Николаевич, Облов, Константин Юрьевич, Этрекова, Майя Оразгельдыевна, Веселов, Денис Сергеевич, Иванова, Анастасия Владимировна, Литвинов, Артур Васильевич

© 2020 Trans Tech Publications Ltd, Switzerland.This paper presents a verification of technology aspects for improvement of field effect capacity type gas sensor parameters by using laser micromilling technique for fabrication ceramic surface mounting device (SMD) package and microheater for sustentation working temperature of metal-insulator-semiconductor structure (MIS structure). Innovative claims include: demonstration of flexible opportunities for new digital fabrication process flows based on laser micromilling tech: fast design of SMD sensor 3-D model, flexible changing topology of microheater, thick and thin film technology combination for reducing of power consumption. The results show possibility to fast fabrication functional sensor in customer ceramic SMD package with base 9x9 mm with twice reduced power consumption and improving mechanical properties compare with classical metal-glass microelectronic packages using before for such type sensors.