Publication: On the possibility of quantitative W-Cr-Y analysis by grazing ion-surface scattering spectroscopy
Дата
2024
Авторы
Efimov, N. E.
Sinelnikov, D.
Grishaev, M.
Nikitin, I.
Wang, Y.
Harutyunyan, Z.
Gasparyan, Y.
Journal Title
Journal ISSN
Volume Title
Издатель
Аннотация
Описание
Ключевые слова
Low-energy ion scattering , Surface Analysis , Secondary Ion Mass Spectrometry , Nanoscale Patterning , Low-energy ion scattering , Surface Analysis , Secondary Ion Mass Spectrometry , Nanoscale Patterning
Цитирование
On the possibility of quantitative W-Cr-Y analysis by grazing ion-surface scattering spectroscopy / Efimov, N. E. [et al.] // Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. - 2024. - 546. - 10.1016/j.nimb.2023.165177