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On the possibility of quantitative W-Cr-Y analysis by grazing ion-surface scattering spectroscopy

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dc.contributor.authorEfimov, N. E.
dc.contributor.authorSinelnikov, D.
dc.contributor.authorGrishaev, M.
dc.contributor.authorNikitin, I.
dc.contributor.authorWang, Y.
dc.contributor.authorHarutyunyan, Z.
dc.contributor.authorGasparyan, Y.
dc.contributor.authorЕфимов, Никита Евгеньевич
dc.contributor.authorСинельников, Дмитрий Николаевич
dc.contributor.authorГришаев, Максим Валерьевич
dc.contributor.authorНикитин, Иван Андреевич
dc.contributor.authorАрутюнян, Зорий Робертович
dc.contributor.authorГаспарян, Юрий Микаэлович
dc.date.accessioned2024-12-04T08:18:50Z
dc.date.available2024-12-04T08:18:50Z
dc.date.issued2024
dc.identifier.citationOn the possibility of quantitative W-Cr-Y analysis by grazing ion-surface scattering spectroscopy / Efimov, N. E. [et al.] // Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. - 2024. - 546. - 10.1016/j.nimb.2023.165177
dc.identifier.doi10.1016/j.nimb.2023.165177
dc.identifier.urihttps://www.doi.org/10.1016/j.nimb.2023.165177
dc.identifier.urihttps://www.scopus.com/record/display.uri?eid=2-s2.0-85178352730&origin=resultslist
dc.identifier.urihttps://openrepository.mephi.ru/handle/123456789/25738
dc.relation.ispartofNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
dc.subjectLow-energy ion scattering
dc.subjectSurface Analysis
dc.subjectSecondary Ion Mass Spectrometry
dc.subjectNanoscale Patterning
dc.subjectLow-energy ion scattering
dc.subjectSurface Analysis
dc.subjectSecondary Ion Mass Spectrometry
dc.subjectNanoscale Patterning
dc.titleOn the possibility of quantitative W-Cr-Y analysis by grazing ion-surface scattering spectroscopy
dc.typeArticle
dspace.entity.typePublication
oaire.citation.volume546
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