Персона: Тумаркин, Александр Владимирович
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Институт лазерных и плазменных технологий
Стратегическая цель Института ЛаПлаз – стать ведущей научной школой и ядром развития инноваций по лазерным, плазменным, радиационным и ускорительным технологиям, с уникальными образовательными программами, востребованными на российском и мировом рынке образовательных услуг.
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Тумаркин
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Александр Владимирович
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- ПубликацияТолько метаданныеDiagnostics of ion fluxes in low-temperature laboratory and industrial plasmas(2019) Kolodko, D, V.; Ageychenkov, D. G.; Kaziev, A, V.; Leonova, K. A.; Kharkov, M. M.; Tumarkin, A. V.; Колодко, Добрыня Вячеславич; Агейченков, Дмитрий Григорьевич; Казиев, Андрей Викторович; Харьков, Максим Михайлович; Тумаркин, Александр ВладимировичWe studied the ion fluxes on metal surfaces in the inductively coupled plasma reactor as a test facility. The gas mixture of argon and nitrogen was used, with 0.44 Pa total pressure. The radiofrequency power was varied in a wide range (250-2000 W). The ion fluxes were sampled in situ using a specially designed electrostatic extractor and then analyzed with a custom-built magnetic sector mass-separator. The gas composition was independently monitored by the quadrupole analyzer. All measurements were accompanied by optical emission spectroscopy (OES). The correlations of measured optical and corpuscular data are discussed. The conversion function linking optical and corpuscular intensities for Ar/N-2 radiofrequency discharge was determined.
- ПубликацияТолько метаданныеDirect ion content measurements in a non-sputtering magnetron discharge(2019) Kaziev, A. V.; Kolodko, D. V.; Ageychenkov, D. G.; Tumarkin, A. V.; Kharkov, M. M.; Stepanova, T. V.; Казиев, Андрей Викторович; Колодко, Добрыня Вячеславич; Агейченков, Дмитрий Григорьевич; Тумаркин, Александр Владимирович; Харьков, Максим Михайлович; Степанова, Татьяна ВладимировнаIn present contribution we report the first direct measurements of ion fluxes in a nonsputtering magnetron discharge (NSMD) with Al cathode in Ar/O-2 mixtures. The diagnostic unit comprising three-electrode electrostatic lens ion extractor, magnetic sector mass-analyzer, and a vacuum electron multiplier was calibrated and then used to record the time-resolved ion counts of Al+ and Ar+ both in NSMD and arc regimes. The results clearly indicate that in NSMD the dominant species are Ar ions while Al ion signal is lower than the sensitivity limit due to noise level, in contrast to the arc discharge. The capabilities of the diagnostics setup and its sensitivity limits are discussed.
- ПубликацияТолько метаданныеLangmuir probe diagnostics of an impulse magnetron discharge with hot Cr target(2019) Tumarkin, A. V.; Kaziev, A, V.; Leonova, K. A.; Kharkov, M. M.; Kolodko, D. V.; Khomyakov, A. Yu.; Тумаркин, Александр Владимирович; Казиев, Андрей Викторович; Харьков, Максим Михайлович; Колодко, Добрыня ВячеславичImpulse magnetron discharge (pulse duration 20 ms) with uncooled Cr target has been investigated with a specially designed Langmuir probe setup in a wide range of parameters (magnetic field and discharge power). The spatial distributions of electron temperature and plasma density have been measured in the gasless self-sputtering mode. It has been shown that in the gasless high-power pulsed discharge with hot Cr target, plasma density is as high as 5 x 10(18) M-3 at a pulsed power density of 1430 W/cm(2), while the electron temperature drops to values below 1 eV.
- ПубликацияОткрытый доступCurrent-voltage characteristics of an impulse magnetron discharge in target material vapor(2020) Kaziev, A. V.; Leonova, K. A.; Kharkov, M. M.; Tumarkin, A. V.; Kolodko, D. V.; Khomyakov, A. Y.; Ageychenkov, D. G.; Казиев, Андрей Викторович; Харьков, Максим Михайлович; Тумаркин, Александр Владимирович; Колодко, Добрыня Вячеславич; Агейченков, Дмитрий Григорьевич© Published under licence by IOP Publishing Ltd.The magnetron discharge with hot (uncooled) target in an impulse mode has been experimentally investigated. The I-V characteristics have been measured depending on the magnetic field strength for three target materials: copper, chromium, and silicon. For melted copper and hot chromium targets, stable gasless (no argon) operation of the magnetron has been demonstrated with maximum impulse power densities about 2.5 kW/cm2 (averaged over the racetrack area). For silicon target, maximum impulse power density was 1.5 kW/cm2 at low argon pressure (0.1 Pa). The magnetic field dependences of discharge parameters have shown the associated changes in differential plasma impedance.
- ПубликацияТолько метаданныеEffects of Ar ion irradiation in an ICP discharge on the titanium surface topology(2020) Chernyh, N. A.; Kharkov, M. M.; Kaziev, A. V.; Danilyuk, D. V.; Kukushkina, M. S.; Tumarkin, A. V.; Kolodko, D. V.; Харьков, Максим Михайлович; Казиев, Андрей Викторович; Кукушкина, Маргарита Сергеевна; Тумаркин, Александр Владимирович; Колодко, Добрыня Вячеславич© 2020 Elsevier B.V.VT1-0 (Russian equivalent of Grade 2) titanium surfaces were modified under argon ion bombardment from the low-pressure inductively coupled plasma (ICP). The ion processing allowed us to prepare various types of structures on titanium with controlled characteristic dimensions at nano- and miscroscale (from tens of nm to 3 µm). The hillock, porous, conical, wall/cell structures as well as their combinations have been obtained. The topology type and the characteristic dimensions of surface features depend on the current density js, Ar ion energy Ei, irradiation fluence Φ (or processing time t), and the sample temperature T during the treatment. The microstructures appear on the surface provided the titanium sample is irradiated at temperatures below 900 °C. The sample temperature was determined by both the average current density (jsav from 0.2 to 20 mA/cm2) and the ion energy (Ei from 150 to 1500 eV). A certain fluence is required for uniform surface coverage with microstructures. We suppose that the titanium surface texturing is a result of a complex interplay of the following mechanisms: sputtering, re-sputtering (shadowing), crystal lattice transformation, accumulation and annihilation of defects, and hypothetically, argon retention.
- ПубликацияТолько метаданныеCharacterization of millisecond-scale high-power impulse magnetron discharge in helium(2020) Kaziev, A. V.; Kolodko, D. V.; Kharkov, M. M.; Rykunov, G. I.; Sergeev, N. S.; Tumarkin, A. V.; Казиев, Андрей Викторович; Колодко, Добрыня Вячеславич; Харьков, Максим Михайлович; Сергеев, Никита Сергеевич; Тумаркин, Александр Владимирович© 2021 IEEEImpulse magnetron discharges with millisecond-scale pulses-extended duration modes of technological high-power impulse magnetron sputtering (HiPIMS)-have promising applications in pulsed plasma facilities of different kinds due to high ionization degree (up to 90%), suitable duration, and scalable hardware design. Depending on operating conditions, at the same power level, two distinct diffuse regimes can be distinguished: the one with intense target sputtering-long HiPIMS (L-HiPIMS),-and the non-sputtering low-voltage one (non-sputtering magnetron discharge). The majority of existing studies of these discharge forms were made for argon working gas. For a number of prospective high-power pulsed plasma applications (e. g. pulsed plasma accelerators and thrusters), however, the option of using light gases is preferable. Here, the operation of a millisecond-scale impulse magnetron discharge (L-HiPIMS) in helium has been examined. The plasma parameters (electron density, electron temperature) were measured in a time-resolved fashion with a Langmuir probe. The electrical measurements were accompanied with optical emission spectroscopy. The use of the long pulsed modes enables achieving high plasma density and accelerating the ion flux with a peak energy of ~ 10 eV.
- ПубликацияТолько метаданныеComparison of thermal properties of a hot target magnetron operated in DC and long HIPIMS modes(2021) Kaziev, A. V.; Kolodko, D. V.; Tumarkin, A, V.; Kharkov, M. M.; Lisenkov, V. Y.; Sergeev, N. S.; Казиев, Андрей Викторович; Колодко, Добрыня Вячеславич; Тумаркин, Александр Владимирович; Харьков, Максим Михайлович; Сергеев, Никита Сергеевич© 2021 Elsevier B.V.Thermal properties of the magnetron discharge with uncooled copper and chromium targets were studied experimentally and theoretically for DC and long HiPIMS (L-HiPIMS) operation modes. A set of thermal fluxes was considered to build a numerical model of the hot target exposed to DC and high-power pulsed plasma. The modeling results were tested in the experiments. The temperature of targets was measured directly in course of magnetron discharge operation with an elaborated contact thermocouple method. The measurements were made in two modes. At first the temporal evolution of temperature was recorded for a fixed applied discharge power. The results were found to well agree with temperature values expected from calculations. At 2 kW power, it takes ~50 s to reach the melting point of copper. The steady-state temperature values were also measured for a number of discharge power levels. The obtained dependence clearly demonstrated that the main mechanisms of the target heat balance at high temperatures are surface radiation and heat transfer due to thermal conductivity of the heat insulation supports between the target and water-cooled cathode. The parameters of DC hot target magnetron were compared to the high-power pulsed regime with the pulse-on time 20 ms. A promising method of a hot target magnetron discharge operation was considered that involves applying long (>20 ms) high-power pulses to the target pre-heated in the DC mode during the pulse-off period.
- ПубликацияТолько метаданныеIon current optimization in a magnetron with tunable magnetic field configuration(2021) Kaziev, A. V.; Ageychenkov, D. G.; Tumarkin, A. V.; Kolodko, D. V.; Sergeev, N. S.; Kharkov, M. M.; Leonova, K. A.; Казиев, Андрей Викторович; Агейченков, Дмитрий Григорьевич; Тумаркин, Александр Владимирович; Колодко, Добрыня Вячеславич; Сергеев, Никита Сергеевич; Харьков, Максим Михайлович© 2021 Institute of Physics Publishing. All rights reserved.The response of the ion current in the substrate region to the magnetic system configuration of a circular magnetron was studied during direct current sputtering of aluminum target. The unbalancing degree induced by changing of magnets’ positions was modelled with finite element methods. The ion saturation current in the substrate region showed more than twofold variation with unbalancing degree in the range 0.6–1.2. The dependence was non-monotonic, and the system was optimized to maximize the substrate ion current. The Langmuir probe diagnostics showed plasma density ~ 1016 m–3 in the optimized magnetic configuration.
- ПубликацияТолько метаданныеEffect of high-temperature oxidation on the surface properties as applied to quenching of high-temperature bodies(2021) Molotova, I. A.; Zabirov, A. R.; Yagov, V. V.; Terentyev, E. V.; Tumarkin, A. V.; Kharkov, M. M.; Тумаркин, Александр Владимирович; Харьков, Максим Михайлович© 2021 Institute of Physics Publishing. All rights reserved.This paper contains the results of studying the surface properties before and after high-temperature oxidation. For this, the plate zirconium samples with chromium, gold and silver coatings were prepared. Cut profiles of the samples were obtained to study the structure of coatings and the thickness of the oxide layer. The measurements of contact angles were carried out. The results showed that a porous heterogeneous oxide layer was formed on the samples after high-temperature oxidation. At the same time, the wettability of the samples was improved. The thickness of the oxide layer on the chrome-coated zirconium sample was the smallest. Using of electroplated silver coating for experiments involving heating to high temperatures seems inappropriate because it was damaged after the oxidation tests. It is assumed that the main factor which influence on the rise of the transition temperature to the intensive cooling regime during quenching is the appearance of the oxide layer, rather than the improved wettability and wickability. High-temperature oxidation leads to the simultaneous formation of an oxide layer with a low thermal effusivity and to an improvement in wettability, therefore the contribution of each of these two effects on quenching can be confused or overestimated.