Publication: TECHNOLOGICAL APPLICATIONS OF PLASMA SURFACE INTERACTIONS
Дата
2015
Авторы
Pisarev, A.
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Volume Title
Издатель
НИЯУ МИФИ
Аннотация
Plasma is the forth state of matter, which is characterized by a high intrinsic temperature. Interaction of this substance with matter leads to serious consequences both for the matter and the plasma. Many effects of plasma-surface interactions are used for practical purposes, and this brief review gives some examples. We will concentrate on applications of low temperature plasma, which is characterized by the electron temperature below 105 K.
Описание
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Конференции НИЯУ МИФИ
Цитирование
Pisarev A. TECHNOLOGICAL APPLICATIONS OF PLASMA SURFACE INTERACTIONS [Text.] /Pisarev A. // Взаимодействие ионов с поверхностью «ВИП – 2015»: труды XXII Международной конференции Том 1. - 2015. - С. 40-44