Персона: Колодко, Добрыня Вячеславич
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Институт нанотехнологий в электронике, спинтронике и фотонике
Институт ИНТЭЛ занимается научной деятельностью и подготовкой специалистов в области исследования физических принципов, проектирования и разработки технологий создания компонентной базы электроники гражданского и специального назначения, а также построения современных приборов на её основе.
Наша основная цель – это создание и развитие научно-образовательного центра мирового уровня в области наноструктурных материалов и устройств электроники, спинтроники, фотоники, а также создание эффективной инновационной среды в области СВЧ-электронной и радиационно-стойкой компонентной базы, источников ТГц излучения, ионно-кластерных технологий материалов.
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Добрыня Вячеславич
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- ПубликацияТолько метаданныеDiagnostics of ion fluxes in low-temperature laboratory and industrial plasmas(2019) Kolodko, D, V.; Ageychenkov, D. G.; Kaziev, A, V.; Leonova, K. A.; Kharkov, M. M.; Tumarkin, A. V.; Колодко, Добрыня Вячеславич; Агейченков, Дмитрий Григорьевич; Казиев, Андрей Викторович; Харьков, Максим Михайлович; Тумаркин, Александр ВладимировичWe studied the ion fluxes on metal surfaces in the inductively coupled plasma reactor as a test facility. The gas mixture of argon and nitrogen was used, with 0.44 Pa total pressure. The radiofrequency power was varied in a wide range (250-2000 W). The ion fluxes were sampled in situ using a specially designed electrostatic extractor and then analyzed with a custom-built magnetic sector mass-separator. The gas composition was independently monitored by the quadrupole analyzer. All measurements were accompanied by optical emission spectroscopy (OES). The correlations of measured optical and corpuscular data are discussed. The conversion function linking optical and corpuscular intensities for Ar/N-2 radiofrequency discharge was determined.
- ПубликацияОткрытый доступЧИСЛЕННАЯ МОДЕЛЬ ВРЕМЯПРОЛЕТНОГО АНАЛИЗАТОРА ДЛЯ ПУЧКА КЛАСТЕРНЫХ ИОНОВ Ar(НИЯУ МИФИ, 2019) Бакун, А. Д.; Гусев, А. С.; Каргин, Н. И.; Колодко, Д. В.; Рындя, С. М.; Сигловая, Н. В.; Агейченков, Д. Г.; Гусев, Александр Сергеевич; Колодко, Добрыня Вячеславич; Рындя, Сергей Михайлович; Каргин, Николай Иванович; Бакун, Алексей Дмитриевич; Сигловая, Наталия ВладимировнаPolishing with cluster ions makes it possible to obtain nanorelief on various materials. Often in such installations, the ion mass distribution is not known reliably. This paper presents the results of a time-of-flight mass analyzer simulation. The time-of-flight analyzer will be used for separation of cluster ions on the Exogenesis nAccel 100 unit.
- ПубликацияОткрытый доступLEIS ANALYSIS OF THE W SURFACE DURING WATER VAPOR ADSORPTION(НИЯУ МИФИ, 2017) Mamedov, N. V.; Kurnaev, V. A.; Sinelnikov, D. N.; Kolodko, D. V.; Sorokin, I. A.; Мамедов, Никита Вадимович; Колодко, Добрыня Вячеславич; Синельников, Дмитрий Николаевич; Сорокин, Иван АлександровичThe adsorption of water on the surface is one of the main problems in vacuum technology. Since water is a good adsorbent, its adsorption is the reason that prevents the fast pumping of vacuum systems up to ultra-high vacuum. In addition, water vapor adsorption on metal surfaces during plasma surface interaction is a problem [1]. Singly scattered and recoil ions could form narrow peaks in energy spectra and provide information about atomic composition of the first atomic layer giving information about structure and composition of the surface and very sensitivity to the first layer of atoms [2 -5]. It was also shown [6] that the thickness of light element thin layers on the heavy substrate can be analyzed with good depth resolution (~0,3nm) due to scattering of hydrogen ions with keV energies. Application of ion scattering spectroscopy at pressures up to several mTorr is presented in [7, 8]. In this work experimental results of low energy ion spectroscopy (LEIS) of W samples during water vapor adsorption are presented.
- ПубликацияТолько метаданныеDirect ion content measurements in a non-sputtering magnetron discharge(2019) Kaziev, A. V.; Kolodko, D. V.; Ageychenkov, D. G.; Tumarkin, A. V.; Kharkov, M. M.; Stepanova, T. V.; Казиев, Андрей Викторович; Колодко, Добрыня Вячеславич; Агейченков, Дмитрий Григорьевич; Тумаркин, Александр Владимирович; Харьков, Максим Михайлович; Степанова, Татьяна ВладимировнаIn present contribution we report the first direct measurements of ion fluxes in a nonsputtering magnetron discharge (NSMD) with Al cathode in Ar/O-2 mixtures. The diagnostic unit comprising three-electrode electrostatic lens ion extractor, magnetic sector mass-analyzer, and a vacuum electron multiplier was calibrated and then used to record the time-resolved ion counts of Al+ and Ar+ both in NSMD and arc regimes. The results clearly indicate that in NSMD the dominant species are Ar ions while Al ion signal is lower than the sensitivity limit due to noise level, in contrast to the arc discharge. The capabilities of the diagnostics setup and its sensitivity limits are discussed.
- ПубликацияТолько метаданныеLangmuir probe diagnostics of an impulse magnetron discharge with hot Cr target(2019) Tumarkin, A. V.; Kaziev, A, V.; Leonova, K. A.; Kharkov, M. M.; Kolodko, D. V.; Khomyakov, A. Yu.; Тумаркин, Александр Владимирович; Казиев, Андрей Викторович; Харьков, Максим Михайлович; Колодко, Добрыня ВячеславичImpulse magnetron discharge (pulse duration 20 ms) with uncooled Cr target has been investigated with a specially designed Langmuir probe setup in a wide range of parameters (magnetic field and discharge power). The spatial distributions of electron temperature and plasma density have been measured in the gasless self-sputtering mode. It has been shown that in the gasless high-power pulsed discharge with hot Cr target, plasma density is as high as 5 x 10(18) M-3 at a pulsed power density of 1430 W/cm(2), while the electron temperature drops to values below 1 eV.
- ПубликацияОткрытый доступTungsten nano-fuzz surface degradation under ion beam(НИЯУ МИФИ, 2015) Sinelnikov, D.; Kurnaev, V.; Kolodko, D.; Solovev, N.; Колодко, Добрыня Вячеславич; Синельников, Дмитрий НиколаевичTungsten is the main candidate for plasma facing material in the divertor zone of a thermonuclear reactor due to high melting temperature, high thermal conductivity and low sputtering erosion yield. However, its surface can be modified by "fuzz" nanostructure, which can form in linear simulators and tokamaks [1] under helium irradiation fluence as high as ~1025m-2and sample temperature in the range of 1000-2000 K. Such structure significantly changes the plasma-wall interaction balance, which results in higher probability of unipolar arc ignition. In the case of arcing, erosion yield sharply increases, especially if arcing takes place on a fuzzy surface [2]. Tungsten fuzz is also characterized by high pre-breakdown current intensity, which could indicate the initial stage of unipolar arc ignition [3]. Prebreakdown currents are usually initiated by field emission due to amplification of electric field on sharp cathode relief. So, an investigation of emission properties dependence on surface relief during fuzz formation and destruction seems to be important for the prediction of unipolar arcing.
- ПубликацияОткрытый доступMetal-ion Penning source for thin films deposition(НИЯУ МИФИ, 2015) Колодко, Д. В.; Синельников, Д. Н.; Казиев, А. В.; Тумаркин, А. В.; Тумаркин, Александр Владимирович; Колодко, Добрыня Вячеславич; Казиев, Андрей Викторович; Синельников, Дмитрий НиколаевичRecently, research areas dealing with coating processes in a magnetron discharge with melted cathode have experienced intensive development [1–3]. In this mode magnetron discharge is operated in the target's vapour and the plasma in this case is purely metallic. Despite the main contribution to the deposition process is introduced by the vaporized (neutral) component, the coating properties are greatly affected by the ion flux [3]. So, it is important to study the process of deposition by ion flux solely.