Publication:
Fabrication of micro-optical connectors for electro-optical sensor devices by a combined femtosecond laser system

Дата
2021
Авторы
Epifanov, E. O.
Tarkhov, M. A.
Timofeeva, E. R.
Trofimov, I. V.
Gonchukov, S. A.
Journal Title
Journal ISSN
Volume Title
Издатель
Научные группы
Организационные подразделения
OrgUnit Logo
Организационная единица
Институт лазерных и плазменных технологий
Стратегическая цель Института ЛаПлаз – стать ведущей научной школой и ядром развития инноваций по лазерным, плазменным, радиационным и ускорительным технологиям, с уникальными образовательными программами, востребованными на российском и мировом рынке образовательных услуг.
Выпуск журнала
Аннотация
© 2021 Astro Ltd.The article demonstrates the fundamental possibility of creating microstructures for various functional purposes using the capabilities of the two-photon femtosecond polymerization method. The developed technological approach for creating a micro-optical holder for standard single-mode and multimode fibers is demonstrated. This type of holder can be used to manufacture a unit for optical matching of optical fibers with sensitive optical elements. The possibility of optical matching of fibers with a superconducting single-photon detector, an array system of bolometric superconducting microbridges, and spherical self-formed microlenses by near infrared-sensitive photopolymerization has been experimentally shown. The device manufacturing process was carried out in a combined single laser micromachining facility using femtosecond laser radiation for lithography with submicron resolution, texturing of the sensor surface, and the formation of microstructures for installing single-mode optical fibers.
Описание
Ключевые слова
Цитирование
Fabrication of micro-optical connectors for electro-optical sensor devices by a combined femtosecond laser system / Epifanov, E.O. [et al.] // Laser Physics Letters. - 2021. - 18. - № 3. - 10.1088/1612-202X/abdcc1
URI
https://www.doi.org/10.1088/1612-202X/abdcc1
 https://www.scopus.com/record/display.uri?eid=2-s2.0-85101256765&origin=resultslist
 http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=Alerting&SrcApp=Alerting&DestApp=WOS_CPL&DestLinkType=FullRecord&UT=WOS:000615228200001
 https://openrepository.mephi.ru/handle/123456789/23689
Коллекции
Публикации