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Fabrication of micro-optical connectors for electro-optical sensor devices by a combined femtosecond laser system

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dc.contributor.authorEpifanov, E. O.
dc.contributor.authorTarkhov, M. A.
dc.contributor.authorTimofeeva, E. R.
dc.contributor.authorTrofimov, I. V.
dc.contributor.authorGonchukov, S. A.
dc.contributor.authorГончуков, Сергей Александрович
dc.date.accessioned2024-11-29T11:47:17Z
dc.date.available2024-11-29T11:47:17Z
dc.date.issued2021
dc.description.abstract© 2021 Astro Ltd.The article demonstrates the fundamental possibility of creating microstructures for various functional purposes using the capabilities of the two-photon femtosecond polymerization method. The developed technological approach for creating a micro-optical holder for standard single-mode and multimode fibers is demonstrated. This type of holder can be used to manufacture a unit for optical matching of optical fibers with sensitive optical elements. The possibility of optical matching of fibers with a superconducting single-photon detector, an array system of bolometric superconducting microbridges, and spherical self-formed microlenses by near infrared-sensitive photopolymerization has been experimentally shown. The device manufacturing process was carried out in a combined single laser micromachining facility using femtosecond laser radiation for lithography with submicron resolution, texturing of the sensor surface, and the formation of microstructures for installing single-mode optical fibers.
dc.identifier.citationFabrication of micro-optical connectors for electro-optical sensor devices by a combined femtosecond laser system / Epifanov, E.O. [et al.] // Laser Physics Letters. - 2021. - 18. - № 3. - 10.1088/1612-202X/abdcc1
dc.identifier.doi10.1088/1612-202X/abdcc1
dc.identifier.urihttps://www.doi.org/10.1088/1612-202X/abdcc1
dc.identifier.urihttps://www.scopus.com/record/display.uri?eid=2-s2.0-85101256765&origin=resultslist
dc.identifier.urihttp://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=Alerting&SrcApp=Alerting&DestApp=WOS_CPL&DestLinkType=FullRecord&UT=WOS:000615228200001
dc.identifier.urihttps://openrepository.mephi.ru/handle/123456789/23689
dc.relation.ispartofLaser Physics Letters
dc.titleFabrication of micro-optical connectors for electro-optical sensor devices by a combined femtosecond laser system
dc.typeArticle
dspace.entity.typePublication
oaire.citation.issue3
oaire.citation.volume18
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relation.isAuthorOfPublication.latestForDiscovery69f56fc6-d025-4126-8e68-ad06554134a1
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