Publication: Modeling of polygonal half-loops dislocations in silicon single crystal using X-ray diffraction topo-tomography data
| dc.contributor.author | Konarev, P. V. | |
| dc.contributor.author | Zolotov, D. A. | |
| dc.contributor.author | Buzmakov, A. V. | |
| dc.contributor.author | Grigoriev, V. A. | |
| dc.contributor.author | Григорьев, Владислав Анатольевич | |
| dc.date.accessioned | 2024-11-29T22:16:27Z | |
| dc.date.available | 2024-11-29T22:16:27Z | |
| dc.date.issued | 2021 | |
| dc.description.abstract | © 2021 Institute of Physics Publishing. All rights reserved.Topo-tomographic methods for identifying defects in semiconductors are the most effective among X-ray methods. Combining experimental data with model calculations makes it possible to determine various parameters and properties of crystal structures. In this work, using X-ray diffraction topo-tomography, images of the dislocation half-loop in Si (111) crystal were obtained. The Takagi-Taupin equations have been used to modeling the topograms. A quantitative comparison of the images made it possible to determine the direction of the Burgers vector. | |
| dc.identifier.citation | Modeling of polygonal half-loops dislocations in silicon single crystal using X-ray diffraction topo-tomography data / Konarev, P.V. [et al.] // Journal of Physics: Conference Series. - 2021. - 2036. - № 1. - 10.1088/1742-6596/2036/1/012015 | |
| dc.identifier.doi | 10.1088/1742-6596/2036/1/012015 | |
| dc.identifier.uri | https://www.doi.org/10.1088/1742-6596/2036/1/012015 | |
| dc.identifier.uri | https://www.scopus.com/record/display.uri?eid=2-s2.0-85118586730&origin=resultslist | |
| dc.identifier.uri | https://openrepository.mephi.ru/handle/123456789/24885 | |
| dc.relation.ispartof | Journal of Physics: Conference Series | |
| dc.title | Modeling of polygonal half-loops dislocations in silicon single crystal using X-ray diffraction topo-tomography data | |
| dc.type | Conference Paper | |
| dspace.entity.type | Publication | |
| oaire.citation.issue | 1 | |
| oaire.citation.volume | 2036 | |
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