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Parameter studies of ceramic MEMS microhotplates fabricated by laser micromilling technology

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dc.contributor.authorSamotaev, N.
dc.contributor.authorOblov, K.
dc.contributor.authorEtrekova, M.
dc.contributor.authorVeselov, D.
dc.contributor.authorGorshkova, A.
dc.contributor.authorСамотаев, Николай Николаевич
dc.contributor.authorОблов, Константин Юрьевич
dc.contributor.authorЭтрекова, Майя Оразгельдыевна
dc.contributor.authorВеселов, Денис Сергеевич
dc.date.accessioned2024-11-25T16:56:51Z
dc.date.available2024-11-25T16:56:51Z
dc.date.issued2020
dc.description.abstract© 2020 Trans Tech Publications Ltd, Switzerland.This paper presents a modeling of technology aspects for fabrication ceramic microelectromechanical systems (MEMS) microhotplate and surface mounting device (SMD) packaging for (MOX) gas sensors applications. Innovative claims include: demonstration of flexible opportunities for new fabrication process flows based on laser micromilling tech; modeling of power consumption MEMS microhotplate depending on the thickness and topology; demonstration of necessity changing thick film technology of metallization to vacuum sputtering by reducing of power consumption. The results show possibility to fast fabrication of different topologies for ceramic MEMS microhotplate in form-factor of SOT-23 type SMD package.
dc.format.extentС. 238-243
dc.identifier.citationParameter studies of ceramic MEMS microhotplates fabricated by laser micromilling technology / Samotaev, N. [et al.] // Materials Science Forum. - 2020. - 977 MSF. - P. 238-243. - 10.4028/www.scientific.net/MSF.977.238
dc.identifier.doi10.4028/www.scientific.net/MSF.977.238
dc.identifier.urihttps://www.doi.org/10.4028/www.scientific.net/MSF.977.238
dc.identifier.urihttps://www.scopus.com/record/display.uri?eid=2-s2.0-85081176022&origin=resultslist
dc.identifier.urihttps://openrepository.mephi.ru/handle/123456789/20389
dc.relation.ispartofMaterials Science Forum
dc.titleParameter studies of ceramic MEMS microhotplates fabricated by laser micromilling technology
dc.typeConference Paper
dspace.entity.typePublication
oaire.citation.volume977 MSF
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