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Effect of the amount of argon in an oxygen ion beam on the optical characteristics of titanium dioxide films obtained via ion-assisted electron beam evaporation

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dc.contributor.authorLebedev, A. D.
dc.contributor.authorKozyrev, A. A.
dc.contributor.authorКозырев, Антон Андреевич
dc.date.accessioned2024-11-21T15:33:11Z
dc.date.available2024-11-21T15:33:11Z
dc.date.issued2019
dc.description.abstract© 2019 Optical Society of America.The effect of argon in a mixture with oxygen in an ion beam on the optical characteristics of titanium dioxide (TiO2) obtained via ion-assisted electron beam evaporation in vacuum was studied. It was shown that the addition of an inert gas at a level of 20%–25% resulted in an increase in the refractive index of the resulting TiO2 coating and a decrease in the sensitivity of the spectral characteristic of the coating to the effect of the atmosphere as a result of the decrease in the film porosity. The maximum amount of argon in the mixture was determined, amounting to 26%, at which the TiO2 film had an extinction coefficient not exceeding k = 0.0001.
dc.format.extentС. 666-670
dc.identifier.citationLebedev, A. D. Effect of the amount of argon in an oxygen ion beam on the optical characteristics of titanium dioxide films obtained via ion-assisted electron beam evaporation / Lebedev, A.D., Kozyrev, A.A. // Journal of Optical Technology (A Translation of Opticheskii Zhurnal). - 2019. - 86. - № 10. - P. 666-670. - 10.1364/JOT.86.000666
dc.identifier.doi10.1364/JOT.86.000666
dc.identifier.urihttps://www.doi.org/10.1364/JOT.86.000666
dc.identifier.urihttps://www.scopus.com/record/display.uri?eid=2-s2.0-85076573696&origin=resultslist
dc.identifier.urihttp://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=Alerting&SrcApp=Alerting&DestApp=WOS_CPL&DestLinkType=FullRecord&UT=WOS:000510016000011
dc.identifier.urihttps://openrepository.mephi.ru/handle/123456789/19050
dc.relation.ispartofJournal of Optical Technology (A Translation of Opticheskii Zhurnal)
dc.titleEffect of the amount of argon in an oxygen ion beam on the optical characteristics of titanium dioxide films obtained via ion-assisted electron beam evaporation
dc.typeArticle
dspace.entity.typePublication
oaire.citation.issue10
oaire.citation.volume86
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relation.isAuthorOfPublication.latestForDiscovery344a4f46-1805-4637-a25a-0135ae68d4d9
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