Publication: Effect of the amount of argon in an oxygen ion beam on the optical characteristics of titanium dioxide films obtained via ion-assisted electron beam evaporation
Дата
2019
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Аннотация
© 2019 Optical Society of America.The effect of argon in a mixture with oxygen in an ion beam on the optical characteristics of titanium dioxide (TiO2) obtained via ion-assisted electron beam evaporation in vacuum was studied. It was shown that the addition of an inert gas at a level of 20%–25% resulted in an increase in the refractive index of the resulting TiO2 coating and a decrease in the sensitivity of the spectral characteristic of the coating to the effect of the atmosphere as a result of the decrease in the film porosity. The maximum amount of argon in the mixture was determined, amounting to 26%, at which the TiO2 film had an extinction coefficient not exceeding k = 0.0001.
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Lebedev, A. D. Effect of the amount of argon in an oxygen ion beam on the optical characteristics of titanium dioxide films obtained via ion-assisted electron beam evaporation / Lebedev, A.D., Kozyrev, A.A. // Journal of Optical Technology (A Translation of Opticheskii Zhurnal). - 2019. - 86. - № 10. - P. 666-670. - 10.1364/JOT.86.000666
URI
https://www.doi.org/10.1364/JOT.86.000666
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https://openrepository.mephi.ru/handle/123456789/19050
https://www.scopus.com/record/display.uri?eid=2-s2.0-85076573696&origin=resultslist
http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=Alerting&SrcApp=Alerting&DestApp=WOS_CPL&DestLinkType=FullRecord&UT=WOS:000510016000011
https://openrepository.mephi.ru/handle/123456789/19050