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Characterization of millisecond-scale high-power impulse magnetron discharge in helium

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dc.contributor.authorKaziev, A. V.
dc.contributor.authorKolodko, D. V.
dc.contributor.authorKharkov, M. M.
dc.contributor.authorRykunov, G. I.
dc.contributor.authorSergeev, N. S.
dc.contributor.authorTumarkin, A. V.
dc.contributor.authorКазиев, Андрей Викторович
dc.contributor.authorКолодко, Добрыня Вячеславич
dc.contributor.authorХарьков, Максим Михайлович
dc.contributor.authorСергеев, Никита Сергеевич
dc.contributor.authorТумаркин, Александр Владимирович
dc.date.accessioned2024-11-27T17:21:51Z
dc.date.available2024-11-27T17:21:51Z
dc.date.issued2020
dc.description.abstract© 2021 IEEEImpulse magnetron discharges with millisecond-scale pulses-extended duration modes of technological high-power impulse magnetron sputtering (HiPIMS)-have promising applications in pulsed plasma facilities of different kinds due to high ionization degree (up to 90%), suitable duration, and scalable hardware design. Depending on operating conditions, at the same power level, two distinct diffuse regimes can be distinguished: the one with intense target sputtering-long HiPIMS (L-HiPIMS),-and the non-sputtering low-voltage one (non-sputtering magnetron discharge). The majority of existing studies of these discharge forms were made for argon working gas. For a number of prospective high-power pulsed plasma applications (e. g. pulsed plasma accelerators and thrusters), however, the option of using light gases is preferable. Here, the operation of a millisecond-scale impulse magnetron discharge (L-HiPIMS) in helium has been examined. The plasma parameters (electron density, electron temperature) were measured in a time-resolved fashion with a Langmuir probe. The electrical measurements were accompanied with optical emission spectroscopy. The use of the long pulsed modes enables achieving high plasma density and accelerating the ion flux with a peak energy of ~ 10 eV.
dc.format.extentС. 409-411
dc.identifier.citationCharacterization of millisecond-scale high-power impulse magnetron discharge in helium / Kaziev, A.V. [et al.] // Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV. - 2020. - 2021-September. - P. 409-411. - 10.1109/ISDEIV46977.2021.9586985
dc.identifier.doi10.1109/ISDEIV46977.2021.9586985
dc.identifier.urihttps://www.doi.org/10.1109/ISDEIV46977.2021.9586985
dc.identifier.urihttps://www.scopus.com/record/display.uri?eid=2-s2.0-85125600814&origin=resultslist
dc.identifier.urihttps://openrepository.mephi.ru/handle/123456789/23247
dc.relation.ispartofProceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV
dc.titleCharacterization of millisecond-scale high-power impulse magnetron discharge in helium
dc.typeConference Paper
dspace.entity.typePublication
oaire.citation.volume2021-September
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