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Methods and Tools for Evaluating the Characteristics of MIS-Capacitor Gas Sensors

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dc.contributor.authorPodlepetsky, B. I.
dc.contributor.authorSamotaev, N. N.
dc.contributor.authorEtrekova, M. O.
dc.contributor.authorLitvinov, A. V.
dc.contributor.authorПодлепецкий, Борис Иванович
dc.contributor.authorСамотаев, Николай Николаевич
dc.contributor.authorЭтрекова, Майя Оразгельдыевна
dc.contributor.authorЛитвинов, Артур Васильевич
dc.date.accessioned2024-12-25T19:32:17Z
dc.date.available2024-12-25T19:32:17Z
dc.date.issued2022
dc.description.abstractBased on the electrophysical models of electrical characteristics of MIS-capacitor sensors, we analyze the features of methods and tools for evaluating metrological characteristics of the sensors in general terms and using the example of hydrogen-sensitive sensor elements with Pd-SiO2-Si structure. Recommendations are given on the choice of optimal circuit modes for determining the performance characteristics of the sensors of concentrations of hydrogen-containing gases and of gas analyzers for various purposes.
dc.format.extentС. 1639-1651
dc.identifier.citationMethods and Tools for Evaluating the Characteristics of MIS-Capacitor Gas Sensors / Podlepetsky, B. I. [et al.] // AUTOMATION AND REMOTE CONTROL. - 2022. - 83. - № 10. - P. 1639-1651. - 10.1134/S00051179220100162
dc.identifier.doi10.1134/S00051179220100162
dc.identifier.urihttps://www.doi.org/10.1134/S00051179220100162
dc.identifier.urihttp://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=Alerting&SrcApp=Alerting&DestApp=WOS_CPL&DestLinkType=FullRecord&UT=WOS:000901754100016
dc.identifier.urihttps://openrepository.mephi.ru/handle/123456789/28490
dc.relation.ispartofAUTOMATION AND REMOTE CONTROL
dc.titleMethods and Tools for Evaluating the Characteristics of MIS-Capacitor Gas Sensors
dc.typeArticle; Proceedings Paper
dspace.entity.typePublication
oaire.citation.issue10
oaire.citation.volume83
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