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Laser Micromilling Technology as a Key for Rapid Ceramic MEMS Devices

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dc.contributor.authorOblov, K. Y.
dc.contributor.authorSamotaev, N. N.
dc.contributor.authorEtrekova, M. O.
dc.contributor.authorGorshkova, A. V.
dc.contributor.authorОблов, Константин Юрьевич
dc.contributor.authorСамотаев, Николай Николаевич
dc.contributor.authorЭтрекова, Майя Оразгельдыевна
dc.date.accessioned2024-11-21T18:22:59Z
dc.date.available2024-11-21T18:22:59Z
dc.date.issued2019
dc.description.abstract© 2019, Pleiades Publishing, Ltd.The flexible laser micromilling technology for ceramic MEMS production of microhotplates in the surface mount device (SMD) package is described. Current results demonstrate that using described technology makes it possible to manufacture all parts of MEMS sensor in the SMD with form factor of SOT-23 package type.
dc.format.extentС. 1508-1512
dc.identifier.citationLaser Micromilling Technology as a Key for Rapid Ceramic MEMS Devices / Oblov, K.Y. [et al.] // Physics of Atomic Nuclei. - 2019. - 82. - № 11. - P. 1508-1512. - 10.1134/S1063778819110152
dc.identifier.doi10.1134/S1063778819110152
dc.identifier.urihttps://www.doi.org/10.1134/S1063778819110152
dc.identifier.urihttps://www.scopus.com/record/display.uri?eid=2-s2.0-85081571998&origin=resultslist
dc.identifier.urihttp://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=Alerting&SrcApp=Alerting&DestApp=WOS_CPL&DestLinkType=FullRecord&UT=WOS:000520708000015
dc.identifier.urihttps://openrepository.mephi.ru/handle/123456789/19500
dc.relation.ispartofPhysics of Atomic Nuclei
dc.titleLaser Micromilling Technology as a Key for Rapid Ceramic MEMS Devices
dc.typeArticle
dspace.entity.typePublication
oaire.citation.issue11
oaire.citation.volume82
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