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Research of ultrashort laser processing Si and glass for microelectronics applications

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dc.contributor.authorKataev, D. M.
dc.contributor.authorEvtikhiev, N. N.
dc.contributor.authorGrezev, N. V.
dc.contributor.authorMurzakov, M. A.
dc.contributor.authorЕвтихиев, Николай Николаевич
dc.date.accessioned2024-12-04T13:47:24Z
dc.date.available2024-12-04T13:47:24Z
dc.date.issued2024
dc.identifier.citationResearch of ultrashort laser processing Si and glass for microelectronics applications / Kataev, D.M. [et al.] // 2024 International Conference Laser Optics, ICLO 2024 - Proceedings. - 2024. - 10.1109/ICLO59702.2024.10624239
dc.identifier.doi10.1109/ICLO59702.2024.10624239
dc.identifier.urihttps://www.doi.org/10.1109/ICLO59702.2024.10624239
dc.identifier.urihttps://www.scopus.com/record/display.uri?eid=2-s2.0-85203134096&origin=resultslist
dc.identifier.urihttps://openrepository.mephi.ru/handle/123456789/26289
dc.relation.ispartof2024 International Conference Laser Optics, ICLO 2024 - Proceedings
dc.titleResearch of ultrashort laser processing Si and glass for microelectronics applications
dc.typeConference Paper
dspace.entity.typePublication
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relation.isAuthorOfPublication.latestForDiscovery2257a3c7-c8e8-4e34-85b5-8c32072e3420
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