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Analysis of Metallic-to-Oxide Sputtering Mode Transition During Reactive Magnetron Deposition of Aluminum Oxide Coatings

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dc.contributor.authorKaziev, A. V.
dc.contributor.authorTumarkin, A. V.
dc.contributor.authorKolodko, D. V.
dc.contributor.authorKharkov, M. M.
dc.contributor.authorKonaguru, R.
dc.contributor.authorAgeychenkov, D. G.
dc.contributor.authorSamotaev, N. N.
dc.contributor.authorOblov, K. Yu.
dc.contributor.authorКазиев, Андрей Викторович
dc.contributor.authorТумаркин, Александр Владимирович
dc.contributor.authorКолодко, Добрыня Вячеславич
dc.contributor.authorХарьков, Максим Михайлович
dc.contributor.authorАгейченков, Дмитрий Григорьевич
dc.contributor.authorСамотаев, Николай Николаевич
dc.contributor.authorОблов, Константин Юрьевич
dc.date.accessioned2025-05-16T14:04:30Z
dc.date.available2025-05-16T14:04:30Z
dc.date.issued2025
dc.identifier.citationAnalysis of Metallic-to-Oxide Sputtering Mode Transition During Reactive Magnetron Deposition of Aluminum Oxide Coatings / Kaziev, A. V. [et al.] // Applied Sciences (Switzerland). - 2025. - 15. - № 8. - 10.3390/app15084305
dc.identifier.doi10.3390/app15084305
dc.identifier.urihttps://www.doi.org/10.3390/app15084305
dc.identifier.urihttps://www.scopus.com/record/display.uri?eid=2-s2.0-105003730774&origin=resultslist
dc.identifier.urihttps://openrepository.mephi.ru/handle/123456789/37190
dc.relation.ispartofApplied Sciences (Switzerland)
dc.titleAnalysis of Metallic-to-Oxide Sputtering Mode Transition During Reactive Magnetron Deposition of Aluminum Oxide Coatings
dc.typeArticle
dspace.entity.typePublication
oaire.citation.issue8
oaire.citation.volume15
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