Publication: SnO2-Pd as a Gate Material for the Capacitor Type Gas Sensor
dc.contributor.author | Samotaev, N. | |
dc.contributor.author | Oblov, K. | |
dc.contributor.author | Litvinov, A. | |
dc.contributor.author | Etrekova, M. | |
dc.contributor.author | Самотаев, Николай Николаевич | |
dc.contributor.author | Облов, Константин Юрьевич | |
dc.contributor.author | Литвинов, Артур Васильевич | |
dc.contributor.author | Этрекова, Майя Оразгельдыевна | |
dc.date.accessioned | 2024-11-21T14:52:23Z | |
dc.date.available | 2024-11-21T14:52:23Z | |
dc.date.issued | 2019 | |
dc.description.abstract | © 2019 IEEE.The article describes the result of the use SnO2-Pd thin films as a gate for structure measured ppb range of NO2 gas by the capacitive method. The technological aspects of fabrication SnO2-Pd gate and one comparison by metrological parameters with the classical Pd gate field effect sensor are discussed. The use of SnO2-Pd material allows improvement in sensitivity of NO2 by an order of magnitude compare the classical Pd based gate field effect sensors. | |
dc.format.extent | С. 153-156 | |
dc.identifier.citation | SnO2-Pd as a Gate Material for the Capacitor Type Gas Sensor / Samotaev, N. [et al.] // 2019 IEEE 31st International Conference on Microelectronics, MIEL 2019 - Proceedings. - 2019. - P. 153-156. - 10.1109/MIEL.2019.8889648 | |
dc.identifier.doi | 10.1109/MIEL.2019.8889648 | |
dc.identifier.uri | https://www.doi.org/10.1109/MIEL.2019.8889648 | |
dc.identifier.uri | https://www.scopus.com/record/display.uri?eid=2-s2.0-85075392446&origin=resultslist | |
dc.identifier.uri | http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=Alerting&SrcApp=Alerting&DestApp=WOS_CPL&DestLinkType=FullRecord&UT=WOS:000565455600031 | |
dc.identifier.uri | https://openrepository.mephi.ru/handle/123456789/18900 | |
dc.relation.ispartof | 2019 IEEE 31st International Conference on Microelectronics, MIEL 2019 - Proceedings | |
dc.title | SnO2-Pd as a Gate Material for the Capacitor Type Gas Sensor | |
dc.type | Conference Paper | |
dspace.entity.type | Publication | |
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