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Modeling of cracking behavior of CrAlN coatings on silicon during micro- and nanoindentation

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dc.contributor.authorKharkov, M. M.
dc.contributor.authorTumarkin, A. V.
dc.contributor.authorProsolov, A. A.
dc.contributor.authorKabanov, G. A.
dc.contributor.authorKolodko, D. V.
dc.contributor.authorTarasov, B. A.
dc.contributor.authorIrmagambetova, S. M.
dc.contributor.authorKaziev, A. V.
dc.contributor.authorХарьков, Максим Михайлович
dc.contributor.authorТумаркин, Александр Владимирович
dc.contributor.authorКабанов, Глеб Алексеевич
dc.contributor.authorКолодко, Добрыня Вячеславич
dc.contributor.authorТарасов, Борис Александрович
dc.contributor.authorИрмагамбетова, Сауле Муханбетовна
dc.contributor.authorКазиев, Андрей Викторович
dc.date.accessioned2024-12-04T11:38:07Z
dc.date.available2024-12-04T11:38:07Z
dc.date.issued2024
dc.identifier.citationModeling of cracking behavior of CrAlN coatings on silicon during micro- and nanoindentation / Kharkov, M.M. [et al.] // Materials Chemistry and Physics. - 2024. - 322. - 10.1016/j.matchemphys.2024.129597
dc.identifier.doi10.1016/j.matchemphys.2024.129597
dc.identifier.urihttps://www.doi.org/10.1016/j.matchemphys.2024.129597
dc.identifier.urihttps://www.scopus.com/record/display.uri?eid=2-s2.0-85196001028&origin=resultslist
dc.identifier.urihttps://openrepository.mephi.ru/handle/123456789/26055
dc.relation.ispartofMaterials Chemistry and Physics
dc.subjectNanoindentation
dc.subjectCoatings
dc.subjectNanostructured Materials
dc.titleModeling of cracking behavior of CrAlN coatings on silicon during micro- and nanoindentation
dc.typeArticle
dspace.entity.typePublication
oaire.citation.volume322
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