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Improvement of field effect capacity type gas sensor thermo inertial parameters by using laser micromilling technique

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dc.contributor.authorSamotaev, N.
dc.contributor.authorOblov, K.
dc.contributor.authorEtrekova, M.
dc.contributor.authorVeselov, D.
dc.contributor.authorIvanova, A.
dc.contributor.authorLitvinov, A.
dc.contributor.authorСамотаев, Николай Николаевич
dc.contributor.authorОблов, Константин Юрьевич
dc.contributor.authorЭтрекова, Майя Оразгельдыевна
dc.contributor.authorВеселов, Денис Сергеевич
dc.contributor.authorИванова, Анастасия Владимировна
dc.contributor.authorЛитвинов, Артур Васильевич
dc.date.accessioned2024-11-25T16:55:56Z
dc.date.available2024-11-25T16:55:56Z
dc.date.issued2020
dc.description.abstract© 2020 Trans Tech Publications Ltd, Switzerland.This paper presents a verification of technology aspects for improvement of field effect capacity type gas sensor parameters by using laser micromilling technique for fabrication ceramic surface mounting device (SMD) package and microheater for sustentation working temperature of metal-insulator-semiconductor structure (MIS structure). Innovative claims include: demonstration of flexible opportunities for new digital fabrication process flows based on laser micromilling tech: fast design of SMD sensor 3-D model, flexible changing topology of microheater, thick and thin film technology combination for reducing of power consumption. The results show possibility to fast fabrication functional sensor in customer ceramic SMD package with base 9x9 mm with twice reduced power consumption and improving mechanical properties compare with classical metal-glass microelectronic packages using before for such type sensors.
dc.format.extentС. 256-260
dc.identifier.citationImprovement of field effect capacity type gas sensor thermo inertial parameters by using laser micromilling technique / Samotaev, N. [et al.] // Materials Science Forum. - 2020. - 977 MSF. - P. 256-260. - 10.4028/www.scientific.net/MSF.977.256
dc.identifier.doi10.4028/www.scientific.net/MSF.977.256
dc.identifier.urihttps://www.doi.org/10.4028/www.scientific.net/MSF.977.256
dc.identifier.urihttps://www.scopus.com/record/display.uri?eid=2-s2.0-85081182579&origin=resultslist
dc.identifier.urihttps://openrepository.mephi.ru/handle/123456789/20387
dc.relation.ispartofMaterials Science Forum
dc.titleImprovement of field effect capacity type gas sensor thermo inertial parameters by using laser micromilling technique
dc.typeConference Paper
dspace.entity.typePublication
oaire.citation.volume977 MSF
relation.isAuthorOfPublication0004cf07-4071-427a-8a4b-df33706477ca
relation.isAuthorOfPublication607c3419-166c-4b97-94c8-2d5d45dde7e4
relation.isAuthorOfPublication5edca8a2-4b70-4c6e-a9df-47b213d95e87
relation.isAuthorOfPublication56e14997-c521-46b3-a241-842404144391
relation.isAuthorOfPublication047c3a8e-f983-4c06-8c14-ee9d03c71417
relation.isAuthorOfPublicationbf7ece45-b374-444e-ba9e-3804d693e483
relation.isAuthorOfPublication.latestForDiscovery0004cf07-4071-427a-8a4b-df33706477ca
relation.isOrgUnitOfPublication06e1796d-4f55-4057-8d7e-bb2f3b5676f5
relation.isOrgUnitOfPublicationdcdb137c-0528-46a5-841b-780227a67cce
relation.isOrgUnitOfPublication.latestForDiscovery06e1796d-4f55-4057-8d7e-bb2f3b5676f5
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