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Study of the Processes of Mesoporous-Silicon Carbonization

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dc.contributor.authorGusev, A. S.
dc.contributor.authorKargin, N. I.
dc.contributor.authorRyndya, S. M.
dc.contributor.authorSafaraliev, G. K.
dc.contributor.authorSiglovaya, N. V.
dc.contributor.authorSultanov, A. O.
dc.contributor.authorTimofeev, A. A.
dc.contributor.authorГусев, Александр Сергеевич
dc.contributor.authorКаргин, Николай Иванович
dc.contributor.authorРындя, Сергей Михайлович
dc.contributor.authorСафаралиев, Гаджимет Керимович
dc.contributor.authorСигловая, Наталия Владимировна
dc.contributor.authorСултанов, Азрет Оюсович
dc.contributor.authorТимофеев, Алексей Афанасьевич
dc.date.accessioned2024-11-21T08:50:40Z
dc.date.available2024-11-21T08:50:40Z
dc.date.issued2019
dc.description.abstract© 2019, Pleiades Publishing, Ltd.Abstract: Experimental and theoretical studies of the processes of mesoporous-silicon carbonization during the formation of buffer layers for the subsequent epitaxy of 3C-SiC films and related wide-gap semiconductors are performed. Analytical expressions for the effective diffusion factor and diffusion length of carbon atoms in a porous system are obtained. The proposed model takes into account the processes of Knudsen diffusion, coagulation and the overgrowth of pores during the formation of a silicon-carbide layer.
dc.format.extentС. 280-284
dc.identifier.citationStudy of the Processes of Mesoporous-Silicon Carbonization / Gusev, A.S. [et al.] // Journal of Surface Investigation. - 2019. - 13. - № 2. - P. 280-284. - 10.1134/S1027451019020083
dc.identifier.doi10.1134/S1027451019020083
dc.identifier.urihttps://www.doi.org/10.1134/S1027451019020083
dc.identifier.urihttps://www.scopus.com/record/display.uri?eid=2-s2.0-85066147011&origin=resultslist
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dc.identifier.urihttps://openrepository.mephi.ru/handle/123456789/18078
dc.relation.ispartofJournal of Surface Investigation
dc.titleStudy of the Processes of Mesoporous-Silicon Carbonization
dc.typeArticle
dspace.entity.typePublication
oaire.citation.issue2
oaire.citation.volume13
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