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Etching of "Microwire-on-Insulator"-Type Structures

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dc.contributor.authorShustin, E. G.
dc.contributor.authorKolodko, D. V.
dc.contributor.authorLuzanov, V. A.
dc.contributor.authorMirgorodskaya, E. N.
dc.contributor.authorSorokin, I. A.
dc.contributor.authorКолодко, Добрыня Вячеславич
dc.contributor.authorСорокин, Иван Александрович
dc.date.accessioned2024-12-25T09:26:43Z
dc.date.available2024-12-25T09:26:43Z
dc.date.issued2022
dc.format.extentС. 638-644
dc.identifier.citationEtching of "Microwire-on-Insulator"-Type Structures / Shustin, E.G. [et al.] // Plasma Physics Reports. - 2022. - 48. - № 6. - P. 638-644. - 10.1134/S1063780X22600517
dc.identifier.doi10.1134/S1063780X22600517
dc.identifier.urihttps://www.doi.org/10.1134/S1063780X22600517
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dc.identifier.urihttps://openrepository.mephi.ru/handle/123456789/27527
dc.relation.ispartofPlasma Physics Reports
dc.titleEtching of "Microwire-on-Insulator"-Type Structures
dc.typeArticle
dspace.entity.typePublication
oaire.citation.issue6
oaire.citation.volume48
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