Publication: Integrated cryogenic resistors formed from NbN thin film under ion beam irradiation
Дата
2019
Авторы
Gurovich, B. A.
Goncharov, B. V.
Dementyeva, M. M.
Kutuzov, L. V.
Prikhodko, K. E.
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© Published under licence by IOP Publishing Ltd.Niobium nitride ultrathin films were synthesized by cathode sputtering technique. The cryogenic resistors built in the superconducting nanowire were formed using the radiation technology developed in National Research Centre "Kurchatov Institute". This technique was based on the transformation of NbN superconducting film to a normal state (at 4.2K) under the composite ion beam irradiation through the resistive mask. The formation of the cryogenic resistors in the broad range of values was demonstrated.
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Integrated cryogenic resistors formed from NbN thin film under ion beam irradiation / Gurovich, B.A. [et al.] // IOP Conference Series: Materials Science and Engineering. - 2019. - 699. - № 1. - 10.1088/1757-899X/699/1/012016