Publication:
Experimental and theoretical insights on the structural and optical properties of GeOx thin films deposited via RF magnetron sputtering under varying oxygen percentage

Дата
2023
Авторы
Şenadım Tüzemen, E.
Hopoğlu, H.
Sarıtaş, S.
Aydınoğlu, H. S.
Ertuğrul, M.
Maslov, M. M.
Kaya, S.
Ungan, F.
Gür, E.
Journal Title
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Издатель
Научные группы
Организационные подразделения
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Организационная единица
Институт нанотехнологий в электронике, спинтронике и фотонике
Институт ИНТЭЛ занимается научной деятельностью и подготовкой специалистов в области исследования физических принципов, проектирования и разработки технологий создания компонентной базы электроники гражданского и специального назначения, а также построения современных приборов на её основе. ​Наша основная цель – это создание и развитие научно-образовательного центра мирового уровня в области наноструктурных материалов и устройств электроники, спинтроники, фотоники, а также создание эффективной инновационной среды в области СВЧ-электронной и радиационно-стойкой компонентной базы, источников ТГц излучения, ионно-кластерных технологий материалов.​
Выпуск журнала
Аннотация
In this study, GeOx films were produced by radio frequency magnetron sputtering (RFMS) under varying oxygen percentages. The structural and optical properties of films grown have been studied experimentally and theoretical calculations have been presented using density functional theory (DFT). Considering the x-ray diffraction (XRD) analysis, Ge (111) peak was observed in the as-deposited film produced only at 2% oxygen percentage. In order to emerge crystal phases, all the amorphous films were annealed at 900 °C under atmospheric conditions. It was found that the intensity of the (101) peak increased as the oxygen percentage increased. At the same time, film grown at 2% oxygen percentage was annealed at different annealing temperatures sequentially at 850, 900, and 950 °C. As a result, the polycrystalline properties changed as the annealing temperature increased. It was found that the optical properties of the films grown are strongly dependent on the oxygen percentage. As the oxygen percentage has changed, the energy band gap has increased to the values 2.30, 2.31, 2.58, and 6.28 eV. There are Ge-O-Ge antisymmetric stretching peaks appeared at 861.51 cm−1, 949.94 cm−1 and symmetric stretching of hexagonal peaks at 516.34 cm−1, 546.29 cm−1, 581.95 cm−1. The energy band gap results of the density functional theory (DFT) calculations are in good agreement with the experimental observations. © 2022 Elsevier B.V.
Описание
Ключевые слова
Density functional theory (DFT) calculations , GeOx , Optical properties , Radio frequency magnetron sputtering (RFMS) , XRD
Цитирование
Experimental and theoretical insights on the structural and optical properties of GeOx thin films deposited via RF magnetron sputtering under varying oxygen percentage / Şenadım Tüzemen, E. [et al.] // Physica B: Condensed Matter. - 2023. - 650. - 10.1016/j.physb.2022.414494
URI
https://www.doi.org/10.1016/j.physb.2022.414494
 https://www.scopus.com/record/display.uri?eid=2-s2.0-85142519435&origin=resultslist
 http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=Alerting&SrcApp=Alerting&DestApp=WOS_CPL&DestLinkType=FullRecord&UT=WOS:000907616200004
 https://openrepository.mephi.ru/handle/123456789/29861
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