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Ceramic microhotplates for low power metal oxide gas sensors

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dc.contributor.authorFritsch, M.
dc.contributor.authorMosch, S.
dc.contributor.authorVinnichenko, M.
dc.contributor.authorTrofimenko, N.
dc.contributor.authorSamotaev, N. N.
dc.contributor.authorOblov, K. Y.
dc.contributor.authorGorshkova, A.
dc.contributor.authorСамотаев, Николай Николаевич
dc.contributor.authorОблов, Константин Юрьевич
dc.date.accessioned2024-11-21T18:58:00Z
dc.date.available2024-11-21T18:58:00Z
dc.date.issued2019
dc.description.abstract© 2019 Elsevier Ltd.The progress of the Internet of Things stimulates the development of sensors of small size and low power consumption. Miniaturized metal-oxide semiconductor (MOX) gas sensors (e.g. methane, hydrogen or carbon monoxide detection) can be integrated into agro-industrial facilities such as livestock facilities, fish farming, forestry, food-storage and horticulture, where they support future-oriented plant production (smart agriculture). The central part of a MOX gas sensor is a micro-hotplate, which is mainly responsible for the sensor power consumption at operating temperatures from 450'°C to 600'°C. Under harsh environmental conductions, ceramic materials are the best choice for the micro-hotplate substrate and sensor housing (ceramic MEMS) in combination with platinum metallization for the heater. To realize such gas sensors with low power consumption (<200 mW) were developed of miniaturized printable heaters on ultra-thin ceramic membranes.
dc.format.extentС. 448-451
dc.identifier.citationCeramic microhotplates for low power metal oxide gas sensors / Fritsch, M. [et al.] // Materials Today: Proceedings. - 2019. - 30. - P. 448-451. - 10.1016/j.matpr.2019.12.394
dc.identifier.doi10.1016/j.matpr.2019.12.394
dc.identifier.urihttps://www.doi.org/10.1016/j.matpr.2019.12.394
dc.identifier.urihttps://www.scopus.com/record/display.uri?eid=2-s2.0-85093496269&origin=resultslist
dc.identifier.urihttp://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=Alerting&SrcApp=Alerting&DestApp=WOS_CPL&DestLinkType=FullRecord&UT=WOS:000576778500018
dc.identifier.urihttps://openrepository.mephi.ru/handle/123456789/19596
dc.relation.ispartofMaterials Today: Proceedings
dc.titleCeramic microhotplates for low power metal oxide gas sensors
dc.typeConference Paper
dspace.entity.typePublication
oaire.citation.volume30
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relation.isAuthorOfPublication607c3419-166c-4b97-94c8-2d5d45dde7e4
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