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Application of Confocal Microscopy Methods for Research and Non-destructive Examination of Semiconductor Structures and Integrated Circuits

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dc.contributor.authorBaluev, A. A.
dc.contributor.authorUkolov, D. S.
dc.contributor.authorPechenkin, A. A.
dc.contributor.authorMozhaev, R. K.
dc.contributor.authorБалуев, Арсений Андреевич
dc.contributor.authorПеченкин, Александр Александрович
dc.contributor.authorМожаев, Роман Константинович
dc.date.accessioned2024-11-29T22:40:13Z
dc.date.available2024-11-29T22:40:13Z
dc.date.issued2021
dc.description.abstract© 2021 IEEE.The paper discusses the features and the possibilities of the under-development scanning confocal microscope in tasks of non-destructive examination of semiconductor electronics using the method of confocal microscopy with an emphasis on the possibility of studying the material and internal structure. The described technique allows studying integrated circuits from the substrate side of integrated circuits. This work is part of a global task and is devoted to mathematical modeling of the scanning process.
dc.format.extentС. 135-138
dc.identifier.citationApplication of Confocal Microscopy Methods for Research and Non-destructive Examination of Semiconductor Structures and Integrated Circuits / Baluev, A.A. [et al.] // Proceedings of the International Conference on Microelectronics, ICM. - 2021. - 2021-September. - P. 135-138. - 10.1109/MIEL52794.2021.9569106
dc.identifier.doi10.1109/MIEL52794.2021.9569106
dc.identifier.urihttps://www.doi.org/10.1109/MIEL52794.2021.9569106
dc.identifier.urihttps://www.scopus.com/record/display.uri?eid=2-s2.0-85118430411&origin=resultslist
dc.identifier.urihttps://openrepository.mephi.ru/handle/123456789/24920
dc.relation.ispartofProceedings of the International Conference on Microelectronics, ICM
dc.titleApplication of Confocal Microscopy Methods for Research and Non-destructive Examination of Semiconductor Structures and Integrated Circuits
dc.typeConference Paper
dspace.entity.typePublication
oaire.citation.volume2021-September
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