Publication:
Estimation of Errors of Integrated Hydrogen Sensors based on MISFET with structure Pd-Ta2O5-SiO2-Si

Простая страница элемента
dc.contributor.authorKovalenko, A.
dc.contributor.authorPodlepetsky, B.
dc.contributor.authorПодлепецкий, Борис Иванович
dc.date.accessioned2024-11-21T14:55:47Z
dc.date.available2024-11-21T14:55:47Z
dc.date.issued2019
dc.description.abstract© 2019 IEEE.We have estimated various types of errors of integrated hydrogen sensors based on MISFETs with structure Pd-Ta2O5-SiO2-Si on the basis of experimental studies of the multiple sensors' hydrogen responses, taking into account operating modes. The generalized model for the calculation of these errors was proposed.
dc.format.extentС. 309-312
dc.identifier.citationKovalenko, A. Estimation of Errors of Integrated Hydrogen Sensors based on MISFET with structure Pd-Ta2O5-SiO2-Si / Kovalenko, A., Podlepetsky, B. // 2019 IEEE 31st International Conference on Microelectronics, MIEL 2019 - Proceedings. - 2019. - P. 309-312. - 10.1109/MIEL.2019.8889631
dc.identifier.doi10.1109/MIEL.2019.8889631
dc.identifier.urihttps://www.doi.org/10.1109/MIEL.2019.8889631
dc.identifier.urihttps://www.scopus.com/record/display.uri?eid=2-s2.0-85075369315&origin=resultslist
dc.identifier.urihttp://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=Alerting&SrcApp=Alerting&DestApp=WOS_CPL&DestLinkType=FullRecord&UT=WOS:000565455600069
dc.identifier.urihttps://openrepository.mephi.ru/handle/123456789/18914
dc.relation.ispartof2019 IEEE 31st International Conference on Microelectronics, MIEL 2019 - Proceedings
dc.titleEstimation of Errors of Integrated Hydrogen Sensors based on MISFET with structure Pd-Ta2O5-SiO2-Si
dc.typeConference Paper
dspace.entity.typePublication
relation.isAuthorOfPublication11795ead-c59a-47cf-bae1-ccbff5788e69
relation.isAuthorOfPublication.latestForDiscovery11795ead-c59a-47cf-bae1-ccbff5788e69
relation.isOrgUnitOfPublication06e1796d-4f55-4057-8d7e-bb2f3b5676f5
relation.isOrgUnitOfPublication.latestForDiscovery06e1796d-4f55-4057-8d7e-bb2f3b5676f5
Файлы
Коллекции
Публикации