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Using the RGB data of bright-field optical microscopy to efficiently monitor the surface cleanliness of the active elements of semiconductor wafers in the planar production cycle

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dc.contributor.authorKozyrev, A. A.
dc.contributor.authorGoreeva, M. V.
dc.contributor.authorBurtsev, D. N.
dc.contributor.authorEliseeva, Yu. A.
dc.contributor.authorКозырев, Антон Андреевич
dc.date.accessioned2024-11-27T07:38:08Z
dc.date.available2024-11-27T07:38:08Z
dc.date.issued2020
dc.description.abstract© 2020 Optical Society of AmericaIt is shown that it is promising to use the RGB data of bright-field optical microscopy to efficiently monitor the surface cleanliness of the active elements of semiconductor wafers in the planar production cycle. It is demonstrated that the film thickness on a substrate surface can be determined from RGB data obtained by means of a photosensor based on a Bayer array with known spectral response. An example shows how to use it on a GaAs semiconductor wafer with metallized active gold elements. Software has been developed for channel-by-channel comparison of a discriminated region of two pictures. An algorithm is presented for obtaining micrographs that can subsequently be analyzed and compared.
dc.format.extentС. 379-388
dc.identifier.citationUsing the RGB data of bright-field optical microscopy to efficiently monitor the surface cleanliness of the active elements of semiconductor wafers in the planar production cycle / Kozyrev, A.A. [et al.] // Journal of Optical Technology (A Translation of Opticheskii Zhurnal). - 2020. - 87. - № 6. - P. 379-388. - 10.1364/JOT.87.000379
dc.identifier.doi10.1364/JOT.87.000379
dc.identifier.urihttps://www.doi.org/10.1364/JOT.87.000379
dc.identifier.urihttps://www.scopus.com/record/display.uri?eid=2-s2.0-85090200369&origin=resultslist
dc.identifier.urihttp://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=Alerting&SrcApp=Alerting&DestApp=WOS_CPL&DestLinkType=FullRecord&UT=WOS:000581266400011
dc.identifier.urihttps://openrepository.mephi.ru/handle/123456789/22288
dc.relation.ispartofJournal of Optical Technology (A Translation of Opticheskii Zhurnal)
dc.titleUsing the RGB data of bright-field optical microscopy to efficiently monitor the surface cleanliness of the active elements of semiconductor wafers in the planar production cycle
dc.typeArticle
dspace.entity.typePublication
oaire.citation.issue6
oaire.citation.volume87
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relation.isAuthorOfPublication.latestForDiscovery344a4f46-1805-4637-a25a-0135ae68d4d9
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