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Diagnostics of ion fluxes in low-temperature laboratory and industrial plasmas

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dc.contributor.authorKolodko, D, V.
dc.contributor.authorAgeychenkov, D. G.
dc.contributor.authorKaziev, A, V.
dc.contributor.authorLeonova, K. A.
dc.contributor.authorKharkov, M. M.
dc.contributor.authorTumarkin, A. V.
dc.contributor.authorКолодко, Добрыня Вячеславич
dc.contributor.authorАгейченков, Дмитрий Григорьевич
dc.contributor.authorКазиев, Андрей Викторович
dc.contributor.authorХарьков, Максим Михайлович
dc.contributor.authorТумаркин, Александр Владимирович
dc.date.accessioned2024-11-21T15:35:21Z
dc.date.available2024-11-21T15:35:21Z
dc.date.issued2019
dc.description.abstractWe studied the ion fluxes on metal surfaces in the inductively coupled plasma reactor as a test facility. The gas mixture of argon and nitrogen was used, with 0.44 Pa total pressure. The radiofrequency power was varied in a wide range (250-2000 W). The ion fluxes were sampled in situ using a specially designed electrostatic extractor and then analyzed with a custom-built magnetic sector mass-separator. The gas composition was independently monitored by the quadrupole analyzer. All measurements were accompanied by optical emission spectroscopy (OES). The correlations of measured optical and corpuscular data are discussed. The conversion function linking optical and corpuscular intensities for Ar/N-2 radiofrequency discharge was determined.
dc.identifier.citationDiagnostics of ion fluxes in low-temperature laboratory and industrial plasmas / Kolodko, DV [et al.] // Journal of Instrumentation. - 2019. - 14. - 10.1088/1748-0221/14/10/P10005
dc.identifier.doi10.1088/1748-0221/14/10/P10005
dc.identifier.urihttps://www.doi.org/10.1088/1748-0221/14/10/P10005
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dc.identifier.urihttp://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=Alerting&SrcApp=Alerting&DestApp=WOS_CPL&DestLinkType=FullRecord&UT=WOS:000501798100005
dc.identifier.urihttps://openrepository.mephi.ru/handle/123456789/19056
dc.relation.ispartofJournal of Instrumentation
dc.titleDiagnostics of ion fluxes in low-temperature laboratory and industrial plasmas
dc.typeArticle
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oaire.citation.volume14
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