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On the possibility of indirect measurement of the thin carbon films thickness using energy-dispersive analysis

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dc.contributor.authorSorokin, I. A.
dc.contributor.authorKolodko, D. V.
dc.contributor.authorСорокин, Иван Александрович
dc.contributor.authorКолодко, Добрыня Вячеславич
dc.date.accessioned2024-11-29T20:40:45Z
dc.date.available2024-11-29T20:40:45Z
dc.date.issued2021
dc.description.abstract© 2021 Elsevier B.V.The article describes theoretical feasibility of a technique for indirect measurement of the thin carbon films thickness using energy dispersive x-ray spectroscopy. The method is based on measuring the ratio of the characteristic radiation from the substrate material below the analyzed carbon film and from the material of the additional covering layer. The technique was compared with a well-known method based on measuring the characteristic substrate material radiation. The possibilities and limits of applicability of the energy dispersive spectroscopy for the thickness determination of thin carbon films were qualitatively determined by Monte Carlo numerical simulation method of characteristic x-ray spectra.
dc.identifier.citationSorokin, I. A. On the possibility of indirect measurement of the thin carbon films thickness using energy-dispersive analysis / Sorokin, I.A., Kolodko, D.V. // Thin Solid Films. - 2021. - 737. - 10.1016/j.tsf.2021.138937
dc.identifier.doi10.1016/j.tsf.2021.138937
dc.identifier.urihttps://www.doi.org/10.1016/j.tsf.2021.138937
dc.identifier.urihttps://www.scopus.com/record/display.uri?eid=2-s2.0-85115384683&origin=resultslist
dc.identifier.urihttp://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=Alerting&SrcApp=Alerting&DestApp=WOS_CPL&DestLinkType=FullRecord&UT=WOS:000704919900004
dc.identifier.urihttps://openrepository.mephi.ru/handle/123456789/24722
dc.relation.ispartofThin Solid Films
dc.titleOn the possibility of indirect measurement of the thin carbon films thickness using energy-dispersive analysis
dc.typeArticle
dspace.entity.typePublication
oaire.citation.volume737
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