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Technology of SMD MOX gas sensors rapid prototyping

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dc.contributor.authorSamotaev, N.
dc.contributor.authorOblov, K.
dc.contributor.authorVeselov, D.
dc.contributor.authorPodlepetsky, B.
dc.contributor.authorEtrekova, M.
dc.contributor.authorVolkov, N.
dc.contributor.authorZibilyuk, N.
dc.contributor.authorСамотаев, Николай Николаевич
dc.contributor.authorОблов, Константин Юрьевич
dc.contributor.authorВеселов, Денис Сергеевич
dc.contributor.authorПодлепецкий, Борис Иванович
dc.contributor.authorЭтрекова, Майя Оразгельдыевна
dc.date.accessioned2024-11-25T16:56:26Z
dc.date.available2024-11-25T16:56:26Z
dc.date.issued2020
dc.description.abstract© 2020 Trans Tech Publications Ltd, Switzerland.This work discusses the design of flexible laser micromilling technology for fast prototyping of metal oxide based (MOX) gas sensors in SMD packages as an alternative to traditional silicon clean room technologies. By laser micromilling technology it is possible to fabricate custom Micro Electro Mechanical System (MEMS) microhotplate platform and also packages for MOX sensor, that gives complete solution for its integration in devices using IoT conception. The tests described in the work show the attainability of the stated results for the fabrication of microhotplates.
dc.format.extentС. 231-237
dc.identifier.citationTechnology of SMD MOX gas sensors rapid prototyping / Samotaev, N. [et al.] // Materials Science Forum. - 2020. - 977 MSF. - P. 231-237. - 10.4028/www.scientific.net/MSF.977.231
dc.identifier.doi10.4028/www.scientific.net/MSF.977.231
dc.identifier.urihttps://www.doi.org/10.4028/www.scientific.net/MSF.977.231
dc.identifier.urihttps://www.scopus.com/record/display.uri?eid=2-s2.0-85081179998&origin=resultslist
dc.identifier.urihttps://openrepository.mephi.ru/handle/123456789/20388
dc.relation.ispartofMaterials Science Forum
dc.titleTechnology of SMD MOX gas sensors rapid prototyping
dc.typeConference Paper
dspace.entity.typePublication
oaire.citation.volume977 MSF
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