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APPLICATION OF KEV-ENERGY PROTON SCATTERING FOR SURFACE ANALYSIS

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dc.contributor.authorBulgadaryan, D.
dc.contributor.authorSinelnikov, D.
dc.contributor.authorKurnaev, V.
dc.contributor.authorEfimov, N.
dc.contributor.authorЕфимов, Никита Евгеньевич
dc.contributor.authorСинельников, Дмитрий Николаевич
dc.date.accessioned2024-11-14T08:40:23Z
dc.date.available2024-11-14T08:40:23Z
dc.date.issued2019
dc.description.abstractLow- and medium-energy ion scattering (LEIS/MEIS) are widely used techniques of surface analysis [1–4]. Conventional LEIS/MEIS setups utilize noble gas ions and electrostatic energy analyzers that makes these methods very sensitive to composition of the uppermost atomic layers of an analyzed sample. However, high neutralization probability of noble gas ions restricts LEIS/MEIS depth profiling capabilities [5]. The use of hydrogen ions with lower neutralization probability instead of noble gas provides possibility to measure the thickness of surface layer if its atomic mass is very different from that of underlying target, that is the case e.g. in nanoelectronics [6] or for redeposition of plasma-facing materials in fusion devices [7]. In this work we present simulated and experimental data on implementation of keV-energy proton scattering (KEPS) for surface analysis.
dc.identifier.citationApplication of kev-energy proton scattering for surface analysis [Text]. / Bulgadaryan D. [et al.] // Взаимодействие ионов с поверхностью ВИП-2019: труды XXIV Международной конференции Том 1. - 2019. - С. 174-177
dc.identifier.urihttps://openrepository.mephi.ru/handle/123456789/16166
dc.publisherНИЯУ МИФИ
dc.subjectКонференции НИЯУ МИФИ
dc.titleAPPLICATION OF KEV-ENERGY PROTON SCATTERING FOR SURFACE ANALYSIS
dc.typeArticle
dspace.entity.typePublication
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2019_Взаимодействие ионов с поверхностью (ВИП)