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Ion current optimization in a magnetron with tunable magnetic field configuration

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dc.contributor.authorKaziev, A. V.
dc.contributor.authorAgeychenkov, D. G.
dc.contributor.authorTumarkin, A. V.
dc.contributor.authorKolodko, D. V.
dc.contributor.authorSergeev, N. S.
dc.contributor.authorKharkov, M. M.
dc.contributor.authorLeonova, K. A.
dc.contributor.authorКазиев, Андрей Викторович
dc.contributor.authorАгейченков, Дмитрий Григорьевич
dc.contributor.authorТумаркин, Александр Владимирович
dc.contributor.authorКолодко, Добрыня Вячеславич
dc.contributor.authorСергеев, Никита Сергеевич
dc.contributor.authorХарьков, Максим Михайлович
dc.date.accessioned2024-11-30T00:19:47Z
dc.date.available2024-11-30T00:19:47Z
dc.date.issued2021
dc.description.abstract© 2021 Institute of Physics Publishing. All rights reserved.The response of the ion current in the substrate region to the magnetic system configuration of a circular magnetron was studied during direct current sputtering of aluminum target. The unbalancing degree induced by changing of magnets’ positions was modelled with finite element methods. The ion saturation current in the substrate region showed more than twofold variation with unbalancing degree in the range 0.6–1.2. The dependence was non-monotonic, and the system was optimized to maximize the substrate ion current. The Langmuir probe diagnostics showed plasma density ~ 1016 m–3 in the optimized magnetic configuration.
dc.identifier.citationIon current optimization in a magnetron with tunable magnetic field configuration / Kaziev, A.V. [et al.] // Journal of Physics: Conference Series. - 2021. - 2064. - № 1. - 10.1088/1742-6596/2064/1/012061
dc.identifier.doi10.1088/1742-6596/2064/1/012061
dc.identifier.urihttps://www.doi.org/10.1088/1742-6596/2064/1/012061
dc.identifier.urihttps://www.scopus.com/record/display.uri?eid=2-s2.0-85120979435&origin=resultslist
dc.identifier.urihttps://openrepository.mephi.ru/handle/123456789/25081
dc.relation.ispartofJournal of Physics: Conference Series
dc.titleIon current optimization in a magnetron with tunable magnetic field configuration
dc.typeConference Paper
dspace.entity.typePublication
oaire.citation.issue1
oaire.citation.volume2064
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