2019, Kolodko, D, V., Ageychenkov, D. G., Kaziev, A, V., Leonova, K. A., Kharkov, M. M., Tumarkin, A. V., Колодко, Добрыня Вячеславич, Агейченков, Дмитрий Григорьевич, Казиев, Андрей Викторович, Харьков, Максим Михайлович, Тумаркин, Александр Владимирович

We studied the ion fluxes on metal surfaces in the inductively coupled plasma reactor as a test facility. The gas mixture of argon and nitrogen was used, with 0.44 Pa total pressure. The radiofrequency power was varied in a wide range (250-2000 W). The ion fluxes were sampled in situ using a specially designed electrostatic extractor and then analyzed with a custom-built magnetic sector mass-separator. The gas composition was independently monitored by the quadrupole analyzer. All measurements were accompanied by optical emission spectroscopy (OES). The correlations of measured optical and corpuscular data are discussed. The conversion function linking optical and corpuscular intensities for Ar/N-2 radiofrequency discharge was determined.

2019, Kaziev, A. V., Kolodko, D. V., Ageychenkov, D. G., Tumarkin, A. V., Kharkov, M. M., Stepanova, T. V., Казиев, Андрей Викторович, Колодко, Добрыня Вячеславич, Агейченков, Дмитрий Григорьевич, Тумаркин, Александр Владимирович, Харьков, Максим Михайлович, Степанова, Татьяна Владимировна

In present contribution we report the first direct measurements of ion fluxes in a nonsputtering magnetron discharge (NSMD) with Al cathode in Ar/O-2 mixtures. The diagnostic unit comprising three-electrode electrostatic lens ion extractor, magnetic sector mass-analyzer, and a vacuum electron multiplier was calibrated and then used to record the time-resolved ion counts of Al+ and Ar+ both in NSMD and arc regimes. The results clearly indicate that in NSMD the dominant species are Ar ions while Al ion signal is lower than the sensitivity limit due to noise level, in contrast to the arc discharge. The capabilities of the diagnostics setup and its sensitivity limits are discussed.