Персона: Харьков, Максим Михайлович
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Институт лазерных и плазменных технологий
Стратегическая цель Института ЛаПлаз – стать ведущей научной школой и ядром развития инноваций по лазерным, плазменным, радиационным и ускорительным технологиям, с уникальными образовательными программами, востребованными на российском и мировом рынке образовательных услуг.
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Максим Михайлович
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- ПубликацияТолько метаданныеDiagnostics of ion fluxes in low-temperature laboratory and industrial plasmas(2019) Kolodko, D, V.; Ageychenkov, D. G.; Kaziev, A, V.; Leonova, K. A.; Kharkov, M. M.; Tumarkin, A. V.; Колодко, Добрыня Вячеславич; Агейченков, Дмитрий Григорьевич; Казиев, Андрей Викторович; Харьков, Максим Михайлович; Тумаркин, Александр ВладимировичWe studied the ion fluxes on metal surfaces in the inductively coupled plasma reactor as a test facility. The gas mixture of argon and nitrogen was used, with 0.44 Pa total pressure. The radiofrequency power was varied in a wide range (250-2000 W). The ion fluxes were sampled in situ using a specially designed electrostatic extractor and then analyzed with a custom-built magnetic sector mass-separator. The gas composition was independently monitored by the quadrupole analyzer. All measurements were accompanied by optical emission spectroscopy (OES). The correlations of measured optical and corpuscular data are discussed. The conversion function linking optical and corpuscular intensities for Ar/N-2 radiofrequency discharge was determined.
- ПубликацияТолько метаданныеDirect ion content measurements in a non-sputtering magnetron discharge(2019) Kaziev, A. V.; Kolodko, D. V.; Ageychenkov, D. G.; Tumarkin, A. V.; Kharkov, M. M.; Stepanova, T. V.; Казиев, Андрей Викторович; Колодко, Добрыня Вячеславич; Агейченков, Дмитрий Григорьевич; Тумаркин, Александр Владимирович; Харьков, Максим Михайлович; Степанова, Татьяна ВладимировнаIn present contribution we report the first direct measurements of ion fluxes in a nonsputtering magnetron discharge (NSMD) with Al cathode in Ar/O-2 mixtures. The diagnostic unit comprising three-electrode electrostatic lens ion extractor, magnetic sector mass-analyzer, and a vacuum electron multiplier was calibrated and then used to record the time-resolved ion counts of Al+ and Ar+ both in NSMD and arc regimes. The results clearly indicate that in NSMD the dominant species are Ar ions while Al ion signal is lower than the sensitivity limit due to noise level, in contrast to the arc discharge. The capabilities of the diagnostics setup and its sensitivity limits are discussed.
- ПубликацияТолько метаданныеLangmuir probe diagnostics of an impulse magnetron discharge with hot Cr target(2019) Tumarkin, A. V.; Kaziev, A, V.; Leonova, K. A.; Kharkov, M. M.; Kolodko, D. V.; Khomyakov, A. Yu.; Тумаркин, Александр Владимирович; Казиев, Андрей Викторович; Харьков, Максим Михайлович; Колодко, Добрыня ВячеславичImpulse magnetron discharge (pulse duration 20 ms) with uncooled Cr target has been investigated with a specially designed Langmuir probe setup in a wide range of parameters (magnetic field and discharge power). The spatial distributions of electron temperature and plasma density have been measured in the gasless self-sputtering mode. It has been shown that in the gasless high-power pulsed discharge with hot Cr target, plasma density is as high as 5 x 10(18) M-3 at a pulsed power density of 1430 W/cm(2), while the electron temperature drops to values below 1 eV.
- ПубликацияТолько метаданныеEffects of Ar ion irradiation in an ICP discharge on the titanium surface topology(2020) Chernyh, N. A.; Kharkov, M. M.; Kaziev, A. V.; Danilyuk, D. V.; Kukushkina, M. S.; Tumarkin, A. V.; Kolodko, D. V.; Харьков, Максим Михайлович; Казиев, Андрей Викторович; Кукушкина, Маргарита Сергеевна; Тумаркин, Александр Владимирович; Колодко, Добрыня Вячеславич© 2020 Elsevier B.V.VT1-0 (Russian equivalent of Grade 2) titanium surfaces were modified under argon ion bombardment from the low-pressure inductively coupled plasma (ICP). The ion processing allowed us to prepare various types of structures on titanium with controlled characteristic dimensions at nano- and miscroscale (from tens of nm to 3 µm). The hillock, porous, conical, wall/cell structures as well as their combinations have been obtained. The topology type and the characteristic dimensions of surface features depend on the current density js, Ar ion energy Ei, irradiation fluence Φ (or processing time t), and the sample temperature T during the treatment. The microstructures appear on the surface provided the titanium sample is irradiated at temperatures below 900 °C. The sample temperature was determined by both the average current density (jsav from 0.2 to 20 mA/cm2) and the ion energy (Ei from 150 to 1500 eV). A certain fluence is required for uniform surface coverage with microstructures. We suppose that the titanium surface texturing is a result of a complex interplay of the following mechanisms: sputtering, re-sputtering (shadowing), crystal lattice transformation, accumulation and annihilation of defects, and hypothetically, argon retention.