Персона: Джумаев, Павел Сергеевич
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Институт ядерной физики и технологий
Цель ИЯФиТ и стратегия развития - создание и развитие научно-образовательного центра мирового уровня в области ядерной физики и технологий, радиационного материаловедения, физики элементарных частиц, астрофизики и космофизики.
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Руководитель научной группы "Лаборатория ионно-плазменной и ионно-пучковой обработки материалов"
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Павел Сергеевич
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- ПубликацияОткрытый доступThermal Conductivity Gas Sensors for High-Temperature Applications(2024) Samotaev, N.; Podlepetsky, B.; Mashinin, M.; Ivanov, I.; Obraztsov, I.; Oblov, K.; Dzhumaev, P.; Самотаев, Николай Николаевич; Подлепецкий, Борис Иванович; Машинин, Михаил Олегович; Иванов, Игорь Александрович; Образцов, Иван Сергеевич; Облов, Константин Юрьевич; Джумаев, Павел СергеевичThis paper describes a fast and flexible microfabrication method for thermal conductivity gas sensors useful in high-temperature applications. The key parts of the sensor, the microheater and the package, were fabricated from glass-coated platinum wire and the combination of laser micromilling (ablation) of already-sintered monolithic ceramic materials and thick-film screen-printing technologies. The final thermal conductivity gas sensor was fabricated in the form of a complete MEMS device in a metal ceramic package, which could be used as a compact miniaturized surface-mounted device for soldering to standard PCB. Functional test results of the manufactured sensor are presented, demonstrating their full suitability for gas sensing applications and indicating that the obtained parameters are at a level comparable to those of standard industrially produced sensors. The results of the design and optimization principles of applied methods are discussed with regard to possible wider applications in thermal gas sensor prototyping in the future. The advantage of the developed sensors is their ability to operate in air environments under high temperatures of 900 ‚шC and above. The sensor element material and package metallization were insensitive to oxidation compared with classical sensor-solution-based metalў??glass packages and silicone MEMS membranes, which exhibit mechanical stress at temperatures above 700 ‚шC.
- ПубликацияОткрытый доступCombination of Material Processing and Characterization Methods for Miniaturization of Field-Effect Gas Sensor(2023) Samotaev, N.; Litvinov, A.; Oblov, K.; Etrekova, M.; Podlepetsky, B.; Dzhumaev, P. S.; Самотаев, Николай Николаевич; Литвинов, Артур Васильевич; Облов, Константин Юрьевич; Этрекова, Майя Оразгельдыевна; Подлепецкий, Борис Иванович; Джумаев, Павел СергеевичThe technological approach for the low-scale production of field-effect gas sensors as electronic components for use in non-lab ambient environments is described. In this work, in addition to the mechanical protection of a gas-sensitive structure, an emphasis was also placed on the very topical issue of thermal stabilization around the one temperature point, even if it is several degrees higher than the surrounding one, which will probably also be useful for any type of application for many types of field-effect sensors. Considerable attention was paid to the characterization of the results obtained by various invasive and non-invasive methods for diagnosing the manufactured construction. The technology described in this article occupies an intermediate position between laboratory samples tested in clean rooms with stable ambient atmospheres, and experimental and small-scale production sensors designed for real operating conditions to solve the narrow application of measuring low concentrations of hydrogen.