(НИЯУ МИФИ, 2019) Bulgadaryan, D.; Sinelnikov, D.; Kurnaev, V.; Efimov, N.; Ефимов, Никита Евгеньевич; Синельников, Дмитрий Николаевич
Low- and medium-energy ion scattering (LEIS/MEIS) are widely used techniques of surface analysis [1–4]. Conventional LEIS/MEIS setups utilize noble gas ions and electrostatic energy analyzers that makes these methods very sensitive to composition of the uppermost atomic layers of an analyzed sample. However, high neutralization probability of noble gas ions restricts LEIS/MEIS depth profiling capabilities [5]. The use of hydrogen ions with lower neutralization probability instead of noble gas provides possibility to measure the thickness of surface layer if its atomic mass is very different from that of underlying target, that is the case e.g. in nanoelectronics [6] or for redeposition of plasma-facing materials in fusion devices [7]. In this work we present simulated and experimental data on implementation of keV-energy proton scattering (KEPS) for surface analysis.