(НИЯУ МИФИ, 2019) Mamedo, N. V.; Kurnaev, V. A.; Sinelnikov, D. N.; Mamedov, I. M.; Синельников, Дмитрий Николаевич; Мамедов, Никита Вадимович
Low-energy (1-20 keV) ion scattering spectroscopy is the widespread method of surface analysis [1,2]. The surface layer composition can be reconstructed from narrow peaks in the energy spectra of the scattered inert gas ions and recoil ions [3]. The main advantage of the surface analysis using inert gas ions is the high sensitivity to the first layer of surface atoms. This is due to the low initial energy of the ions (and therefore small ion penetration depth) and the high neutralization probability of the reflected ions, which increases with the penetration depth of the incident particle into the solid [3]. However, for quantitative surface analysis, it is extremely important to determine the neutralization probability (or the probability of ion survival), since this method usually detects reflected ions only.