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Creation of thin superconducting MoCN thin film by cathode sputtering technique as a basic material for functional cryogenic nanoelements

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dc.contributor.authorGoncharov, B. V.
dc.contributor.authorGurovich, B. A.
dc.contributor.authorDementyeva, M. M.
dc.contributor.authorOlshansky, E. D.
dc.contributor.authorPrikhodko, K. E.
dc.contributor.authorПриходько, Кирилл Евгеньевич
dc.date.accessioned2024-11-21T17:31:16Z
dc.date.available2024-11-21T17:31:16Z
dc.date.issued2019
dc.description.abstract© Published under licence by IOP Publishing Ltd.Thin MoCN films were synthesized by a method of cathode sputtering of mosaic Mo-C targets by nitrogen ions at temperature of 800°C on substrates of the oxidized silicon. The temperature dependences of electrical resistance of the films in the range of 4.2-300°K were measured. Volt-ampere characteristics of the films and critical current density vs film thickness were obtained at a temperature of 4.2°K. The microstructure and film-depth chemical composition profiles of thin films were investigated by analytical techniques of the transmission electron microscopy (HRTEM, EELS) on a cross-section samples made by the focused ion beam (FIB). It was established that MoCN thin film at a thickness of 8 nm contained MoC and Mo5N6 layers. The high density of critical current in these films indicated prospects of their application in the field of cryogenic nanotechnologies.
dc.identifier.citationCreation of thin superconducting MoCN thin film by cathode sputtering technique as a basic material for functional cryogenic nanoelements / Goncharov, B.V. [et al.] // IOP Conference Series: Materials Science and Engineering. - 2019. - 699. - № 1. - 10.1088/1757-899X/699/1/012014
dc.identifier.doi10.1088/1757-899X/699/1/012014
dc.identifier.urihttps://www.doi.org/10.1088/1757-899X/699/1/012014
dc.identifier.urihttps://www.scopus.com/record/display.uri?eid=2-s2.0-85078244236&origin=resultslist
dc.identifier.urihttps://openrepository.mephi.ru/handle/123456789/19354
dc.relation.ispartofIOP Conference Series: Materials Science and Engineering
dc.titleCreation of thin superconducting MoCN thin film by cathode sputtering technique as a basic material for functional cryogenic nanoelements
dc.typeConference Paper
dspace.entity.typePublication
oaire.citation.issue1
oaire.citation.volume699
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relation.isAuthorOfPublication.latestForDiscovery162432cf-0190-45b0-93f6-e38eae07a362
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