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Silicon MEMS Thermocatalytic Gas Sensor in Miniature Surface Mounted Device Form

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dc.contributor.authorSamotaev, N.
dc.contributor.authorSamotaev, N
dc.contributor.authorDzhumaev, P.
dc.contributor.authorOblov, K.
dc.contributor.authorPisliakov, A.
dc.contributor.authorСамотаев, Николай Николаевич
dc.contributor.authorДжумаев, Павел Сергеевич
dc.contributor.authorОблов, Константин Юрьевич
dc.contributor.authorОбразцов, Иван Сергеевич
dc.date.accessioned2024-11-30T01:26:02Z
dc.date.available2024-11-30T01:26:02Z
dc.date.issued2021
dc.description.abstractA reduced size thermocatalytic gas sensor was developed for the detection of methane over the 20% of the explosive concentration. The sensor chip is formed from two membranes with a 150 mu m diameter heated area in their centers and covered with highly dispersed nano-sized catalyst and inert reference, respectively. The power dissipation of the chip is well below 70 mW at the 530 degrees C maximum operation temperature. The chip is mounted in a novel surface mounted metal-ceramic sensor package in the form-factor of SOT-89. The sensitivity of the device is 10 mV/v%, whereas the response and recovery times without the additional carbon filter over the chip are <500 ms and <2 s, respectively. The tests have shown the reliability of the new design concerning the hotplate stability and massive encapsulation, but the high degradation rate of the catalyst coupled with its modest chemical power limits the use of the sensor only in pulsed mode of operation. The optimized pulsed mode reduces the average power consumption below 2 mW.
dc.identifier.citationSilicon MEMS Thermocatalytic Gas Sensor in Miniature Surface Mounted Device Form / Samotaev, N [et al.] // Chemosensors. - 2021. - 9. - № 12. - 10.3390/chemosensors9120340
dc.identifier.doi10.3390/chemosensors9120340
dc.identifier.urihttps://www.doi.org/10.3390/chemosensors9120340
dc.identifier.urihttps://www.scopus.com/record/display.uri?eid=2-s2.0-85134072172&origin=resultslist
dc.identifier.urihttp://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=Alerting&SrcApp=Alerting&DestApp=WOS_CPL&DestLinkType=FullRecord&UT=WOS:000735738900001
dc.identifier.urihttps://openrepository.mephi.ru/handle/123456789/25184
dc.relation.ispartofChemosensors
dc.titleSilicon MEMS Thermocatalytic Gas Sensor in Miniature Surface Mounted Device Form
dc.typeArticle
dspace.entity.typePublication
oaire.citation.issue12
oaire.citation.volume9
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