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Langmuir probe diagnostics of an impulse magnetron discharge with hot Cr target

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dc.contributor.authorTumarkin, A. V.
dc.contributor.authorKaziev, A, V.
dc.contributor.authorLeonova, K. A.
dc.contributor.authorKharkov, M. M.
dc.contributor.authorKolodko, D. V.
dc.contributor.authorKhomyakov, A. Yu.
dc.contributor.authorТумаркин, Александр Владимирович
dc.contributor.authorКазиев, Андрей Викторович
dc.contributor.authorХарьков, Максим Михайлович
dc.contributor.authorКолодко, Добрыня Вячеславич
dc.date.accessioned2024-11-21T12:15:35Z
dc.date.available2024-11-21T12:15:35Z
dc.date.issued2019
dc.description.abstractImpulse magnetron discharge (pulse duration 20 ms) with uncooled Cr target has been investigated with a specially designed Langmuir probe setup in a wide range of parameters (magnetic field and discharge power). The spatial distributions of electron temperature and plasma density have been measured in the gasless self-sputtering mode. It has been shown that in the gasless high-power pulsed discharge with hot Cr target, plasma density is as high as 5 x 10(18) M-3 at a pulsed power density of 1430 W/cm(2), while the electron temperature drops to values below 1 eV.
dc.identifier.citationLangmuir probe diagnostics of an impulse magnetron discharge with hot Cr target / Tumarkin, A, V [et al.] // Journal of Instrumentation. - 2019. - 14. - 10.1088/1748-0221/14/09/C09026
dc.identifier.doi10.1088/1748-0221/14/09/C09026
dc.identifier.urihttps://www.doi.org/10.1088/1748-0221/14/09/C09026
dc.identifier.urihttps://www.scopus.com/record/display.uri?eid=2-s2.0-85074416786&origin=resultslist
dc.identifier.urihttp://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=Alerting&SrcApp=Alerting&DestApp=WOS_CPL&DestLinkType=FullRecord&UT=WOS:000486989800026
dc.identifier.urihttps://openrepository.mephi.ru/handle/123456789/18726
dc.relation.ispartofJournal of Instrumentation
dc.titleLangmuir probe diagnostics of an impulse magnetron discharge with hot Cr target
dc.typeConference Paper
dspace.entity.typePublication
oaire.citation.volume14
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