Publication:
Laser scanning confocal IR microscopy for non-destructive testing of semiconductors

Простая страница элемента
dc.contributor.authorUkolov, D.
dc.contributor.authorBaluev, A.
dc.contributor.authorGromova, P.
dc.contributor.authorPechenkin, A.
dc.contributor.authorMozhaev, R.
dc.contributor.authorБалуев, Арсений Андреевич
dc.contributor.authorПеченкин, Александр Александрович
dc.contributor.authorМожаев, Роман Константинович
dc.date.accessioned2024-12-25T15:58:34Z
dc.date.available2024-12-25T15:58:34Z
dc.date.issued2022
dc.description.abstract© 2022 IEEE.The article discusses characteristics of the laser scanning confocal IR microscope being developed for applications of non-destructive testing of semiconductor structures. The existing methods and analysis facilities of integrated circuits are described. In this review, the method of laser confocal IR-microscopy is considered. The laser scanning confocal IR-microscope will make it possible to reconstruct the internal structure of an integrated circuit and identify its materials without special environmental conditions during research, for example, such as vacuum chamber or x-ray facility.
dc.identifier.citationLaser scanning confocal IR microscopy for non-destructive testing of semiconductors / Ukolov, D. [et al.] // Moscow Workshop on Electronic and Networking Technologies, MWENT 2022 - Proceedings. - 2022. - 10.1109/MWENT55238.2022.9802329
dc.identifier.doi10.1109/MWENT55238.2022.9802329
dc.identifier.urihttps://www.doi.org/10.1109/MWENT55238.2022.9802329
dc.identifier.urihttps://www.scopus.com/record/display.uri?eid=2-s2.0-85134034086&origin=resultslist
dc.identifier.urihttps://openrepository.mephi.ru/handle/123456789/28129
dc.relation.ispartofMoscow Workshop on Electronic and Networking Technologies, MWENT 2022 - Proceedings
dc.titleLaser scanning confocal IR microscopy for non-destructive testing of semiconductors
dc.typeConference Paper
dspace.entity.typePublication
relation.isAuthorOfPublication41bc772d-bb09-4282-96c5-7e2f5114df39
relation.isAuthorOfPublication69e0f0b5-e2c8-44a1-a497-5e79154c0589
relation.isAuthorOfPublicatione5fba163-355d-4116-8151-4229dadb5809
relation.isAuthorOfPublication.latestForDiscovery41bc772d-bb09-4282-96c5-7e2f5114df39
relation.isOrgUnitOfPublication06e1796d-4f55-4057-8d7e-bb2f3b5676f5
relation.isOrgUnitOfPublication543ffddb-d115-4466-be75-83b0f2c5a473
relation.isOrgUnitOfPublication.latestForDiscovery06e1796d-4f55-4057-8d7e-bb2f3b5676f5
Файлы
Коллекции
Публикации