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Effects of Ar ion irradiation in an ICP discharge on the titanium surface topology

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dc.contributor.authorChernyh, N. A.
dc.contributor.authorKharkov, M. M.
dc.contributor.authorKaziev, A. V.
dc.contributor.authorDanilyuk, D. V.
dc.contributor.authorKukushkina, M. S.
dc.contributor.authorTumarkin, A. V.
dc.contributor.authorKolodko, D. V.
dc.contributor.authorХарьков, Максим Михайлович
dc.contributor.authorКазиев, Андрей Викторович
dc.contributor.authorКукушкина, Маргарита Сергеевна
dc.contributor.authorТумаркин, Александр Владимирович
dc.contributor.authorКолодко, Добрыня Вячеславич
dc.date.accessioned2024-11-26T14:18:20Z
dc.date.available2024-11-26T14:18:20Z
dc.date.issued2020
dc.description.abstract© 2020 Elsevier B.V.VT1-0 (Russian equivalent of Grade 2) titanium surfaces were modified under argon ion bombardment from the low-pressure inductively coupled plasma (ICP). The ion processing allowed us to prepare various types of structures on titanium with controlled characteristic dimensions at nano- and miscroscale (from tens of nm to 3 µm). The hillock, porous, conical, wall/cell structures as well as their combinations have been obtained. The topology type and the characteristic dimensions of surface features depend on the current density js, Ar ion energy Ei, irradiation fluence Φ (or processing time t), and the sample temperature T during the treatment. The microstructures appear on the surface provided the titanium sample is irradiated at temperatures below 900 °C. The sample temperature was determined by both the average current density (jsav from 0.2 to 20 mA/cm2) and the ion energy (Ei from 150 to 1500 eV). A certain fluence is required for uniform surface coverage with microstructures. We suppose that the titanium surface texturing is a result of a complex interplay of the following mechanisms: sputtering, re-sputtering (shadowing), crystal lattice transformation, accumulation and annihilation of defects, and hypothetically, argon retention.
dc.identifier.citationEffects of Ar ion irradiation in an ICP discharge on the titanium surface topology / Chernyh, N.A. [et al.] // Applied Surface Science. - 2020. - 527. - 10.1016/j.apsusc.2020.146902
dc.identifier.doi10.1016/j.apsusc.2020.146902
dc.identifier.urihttps://www.doi.org/10.1016/j.apsusc.2020.146902
dc.identifier.urihttps://www.scopus.com/record/display.uri?eid=2-s2.0-85086585315&origin=resultslist
dc.identifier.urihttp://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=Alerting&SrcApp=Alerting&DestApp=WOS_CPL&DestLinkType=FullRecord&UT=WOS:000564202400009
dc.identifier.urihttps://openrepository.mephi.ru/handle/123456789/21931
dc.relation.ispartofApplied Surface Science
dc.titleEffects of Ar ion irradiation in an ICP discharge on the titanium surface topology
dc.typeArticle
dspace.entity.typePublication
oaire.citation.volume527
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